Measurement correction device and measurement correction method

Abstract

The invention discloses a measurement correction device and a measurement correction method. The measurement and correction device includes: a carrying unit, a reference unit, a measuring unit, and a processing unit; the carrying unit includes a carrying surface facing one side of the measuring unit, the carrying surface includes a first area and a second area surrounding the first area, and the first area is used for For carrying the sample to be tested, the second area is used to carry the reference unit; the reference unit is fixed on the second area of ​​the carrying unit; the reference unit includes a plurality of positioning marks, and the positioning marks have theoretical position information in the carrying surface; the measuring unit is used for measuring At least part of the actual position information of the positioning marks on the bearing surface, and the actual position information is transmitted to the processing unit; the processing unit is used to obtain the position correction information of the positioning marks according to the actual position information and the theoretical position information. The technical solution of the invention can reduce the measurement correction error and is beneficial to accurate correction, thereby improving the measurement accuracy of position information.

Description

technical field [0001] The embodiments of the present invention relate to the field of measurement technology, and in particular, to a measurement correction device and a measurement correction method. Background technique [0002] The length measuring device is a device for measuring the position information of the sample to be tested. Length measurement equipment usually uses interferometers as position positioning and measurement systems. However, due to the long-term drift of the interferometer itself, and the long-term changes in the mechanical structure inside the length measurement equipment, the accuracy of measuring the length of the substrate will be affected. . To solve this problem, the length measuring equipment needs to be calibrated regularly. The current calibration method is usually as follows: the reference calibration plate is used as the calibration standard, and the reference calibration plate is uploaded to the length measuring equipment for measureme...

AI Technical Summary

Problems solved by technology

[0003] However, in this calibration method, the size of the reference calibration plate is large and requires multiple human intervention measurements. Not only is there a risk of damage during the uploading, storage and protection of the reference calibration plate, but also the measurement error is high, which easily leads to measurement accuracy. poor

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