A micro-ring coupled multi-channel integrated photodetector
A photodetector and multi-channel technology, applied in the direction of electric solid-state devices, circuits, electrical components, etc., can solve problems such as difficulties in the production process of photodetectors, failure to meet system requirements, low light absorption response, etc., and achieve loss uniformity Good, small size, reproducible results
Active Publication Date: 2022-06-28
BEIJING UNIV OF TECH
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Problems solved by technology
[0008] With the development of laser and infrared technology, in many cases, a single photodetector can only detect one kind of light, the stability is poor, and the responsivity to light absorption is not high, which can no longer meet the system requirements. Therefore, the array (Linear array and area array) photodetectors came into being, but the production process of array (linear array and area array) photodetectors is relatively difficult and the stability is low
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[0038] In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
[0039] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for t...
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The invention discloses a micro-ring coupled multi-channel integrated photodetector, which belongs to the technical field of photoelectric detection, and includes a substrate, which sequentially includes a top intrinsic layer, a buried oxygen layer and a bottom intrinsic layer from top to bottom; the substrate A multimode waveguide and multiple microring structures located on both sides of the multimode waveguide are formed by etching on the top layer of the multimode waveguide; the surface of the microring structure is doped and deposited with the first electrode layer to form an ohmic contact; light absorption is grown on the microring structure Layer, the surface of the light absorbing layer is doped and deposited with the second electrode layer; the first electrode is drawn out on the first electrode layer, the second electrode layer is drawn out the second electrode, and a potential difference is formed between the second electrode and the first electrode to realize photoelectricity convert. The present invention utilizes the narrow-bandwidth coupling performance of the microring structure, integrates it with the multimode waveguide, and combines the heterojunction epitaxy technology to integrate the light absorbing layer above the microring to realize multi-channel light reception, which is suitable for mass production, Small size and easy integration.
Description
technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a micro-ring coupled multi-channel integrated photoelectric detector. Background technique [0002] With the rapid development of society and economy, optical communication technology has achieved very important achievements, which not only promotes the overall improvement of the communication efficiency between people, but also ensures the comprehensive development of modern, intelligent and automated technology. As a brand-new information transmission technology, optical communication technology has become the main communication method of modern communication, almost replacing traditional copper cable communication technology, and plays a very important role in modern information networks. It has been used in many fields and industries. Application has become an important means to improve the quality and efficiency of communication, and has promoted the revoluti...
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IPC IPC(8): H01L31/0232H01L31/0352H01L31/09H01L27/144
CPCH01L31/02327H01L31/0352H01L31/09H01L27/1446
Inventor 李冲杨帅李巍泽李占杰张琛辉徐港
Owner BEIJING UNIV OF TECH