Micro-ring coupling multichannel integrated photoelectric detector

Abstract

The invention discloses a micro-ring coupling multichannel integrated photoelectric detector, and belongs to the technical field of photoelectric detection. The detector comprises a substrate, and the substrate sequentially comprises a top intrinsic layer, a buried oxide layer and a bottom intrinsic layer from top to bottom. The top layer of the substrate is etched to form a multi-mode waveguide and a plurality of micro-ring structures located on the two sides of the multi-mode waveguide; a first electrode layer is doped and deposited in the surface of the micro-ring structure to form ohmic contact; a light absorption layer grows on the micro-ring structure, and a second electrode layer is doped and deposited in the surface of the light absorption layer; a first electrode is led out from the first electrode layer, a second electrode is led out from the second electrode layer, potential difference is formed between the second electrode and the first electrode, and photoelectric conversion is achieved. The narrow bandwidth coupling performance of the micro-ring structure is utilized, the micro-ring structure is integrated with the multi-mode waveguide, the heterojunction epitaxy technology is combined, the light absorption layer is integrated above the micro-ring, multi-channel light receiving is achieved, the arrangement is suitable for batch production, the size is small, and integration is easy.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a micro-ring coupled multi-channel integrated photodetector. Background technique [0002] With the rapid development of social economy, optical communication technology has made very important achievements, which not only promotes the comprehensive improvement of communication efficiency between people, but also ensures the comprehensive development of modernization, intelligence and automation technology. As a new information transmission technology, optical communication technology has become the main communication mode of modern communication, almost replacing traditional copper cable communication technology, and plays a very important role in modern information network. It has been used in many fields and industries The application has become an important means to improve the quality and efficiency of communication, and has promoted the revolution of human s...

AI Technical Summary

Problems solved by technology

[0008] With the development of laser and infrared technology, in many cases, a single photodetector can only detect one kind of light, the stability is poor, and the responsivity to light absorption is not high, which can no longer meet the system requirements. Therefore, the array (Linear array and area array) photodetectors came into being, but the production process of array (linear array and area array) photodetectors is relatively difficult and the stability is low

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