Design and fabrication method of a high-power vertical structure ultraviolet LED chip
A LED chip and vertical structure technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of difficulty in adapting to high-power and convenient applications, high manufacturing costs, and low luminous efficiency, and achieve increased single-sided light output efficiency , large band gap, and the effect of reducing dislocation density
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[0034] see Figure 1-5 , the present invention provides a technical solution: a design and manufacturing method of a high-power vertical structure ultraviolet LED chip, the design of the high-power vertical structure ultraviolet LED chip is as follows: a sapphire substrate is used as a growth substrate for heteroepitaxial growth, Using MOCVD technology to complete the entire epitaxial process, the sapphire substrate adopts an image substrate, that is, a PSS substrate. This substrate adopts a special design, which is a triangular pyramid structure with a vertex angle of 120°. A thin layer of low-temperature InN is grown on the PSS. Then grow a layer of InGaN, then grow a thin layer of AlGaInN, then grow a layer of high-temperature GaN, then grow a layer of BGaN, then grow a layer of n-type AlGaN, then grow an active layer, an electron blocking layer, and then The growth DBR reflective layer is composed of 10-50 BAlN or BGaN or BN and AlN periodic structure layers, doped with ma...
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