A kind of spectrum-mass spectrometry device and detection method

Abstract

The invention discloses a spectrum-mass spectrometry device and a detection method. The spectrum-mass spectrometry device includes a spectrum analysis module and a mass spectrum analysis module connected to each other, and the working negative pressure of the mass spectrometry module is the spectrum analysis module. The spectroscopic analysis provides a vacuum environment; the multi-component mixed gas is subjected to spectral analysis through the spectral analysis module to obtain the absolute concentration of a part of the components in the multi-component mixed gas sample, and then the mass spectrometric analysis module is used to perform spectral analysis from the spectral analysis module. The multi-component mixed gas sample output by the module is analyzed by mass spectrometry to obtain the relative concentration of the components to be measured in the mixed gas sample. The spectrum-mass spectrometry device provided by the present invention can realize fast and convenient real-time online analysis of all components of the mixed gas with high precision (PPM-PPB level trace analysis) and high resolution (not interfered by background gas and impurities) Concentration, easy to use, no consumables, maintenance-free, long-term stable operation.

Description

technical field [0001] The invention relates to the field of gas analysis, in particular to a spectrum-mass spectrometry device and a detection method. Background technique [0002] In the online or offline analysis of gases in petrochemical, natural gas, metallurgy and other industries, commonly used mixed gas analysis methods include chromatography, spectroscopy and mass spectrometry. [0003] Chromatography, for gas analysis is "Gas Chromatography (GC)". The analysis process is to use a carrier gas to send a small amount of sample gas into a porous body called a chromatographic column, and use the difference in the diffusion speed of different component gases in the chromatographic column to achieve the separation of mixed gases and finally achieve gas analysis. the goal of. This is the mainstream method of gas analysis at present, with relatively mature development and relatively high precision. However, the analysis period of this method is relatively long, and the r...

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Problems solved by technology

However, this method directly obtains the relative proportion of each component, and it is difficult to obtain the absolute concentration of the component gas

One of the methods to solve these problems is "chromatography-mass spectrometry (GC-MS)", but due to the use of chromatography, the analysis speed is greatly reduced, and the cost of use and maintenance is significantly increased.

In addition, mass spectrometry for gas components with the same or similar mass-to-charge ratios (such as CO and N 2 ), there is no way to distinguish

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