A Differential Spectral Calibration Method for Azimuth Angle of Polarization Element in Ellipsometry System
A technology of measurement system and polarization element, which is applied in the direction of testing optical performance, geometric characteristics/aberration measurement, polarization influence characteristics, etc. Efficiency, simplifying experimental repetition steps, reducing the effect of optical property requirements
Active Publication Date: 2021-11-19
FUDAN UNIV
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Problems solved by technology
This method needs to use the method of rotating the polarizer to measure the position of each polarizer several times near the lowest light intensity to determine the lowest light intensity value. The steps are cumbersome and the efficiency is limited.
At the same time, if the phase difference Δ of the sample electric field vector reflection coefficient in the s and p light directions is close to 180 degrees, the reflected ellipsoidal light will be close to linearly polarized light, and the minimum light intensity is also close to 0 at this time, which limits the accuracy of the calibration method Spend
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[0073] The technical solutions of the present invention are described in detail below through examples.
[0074] Such as figure 1 As shown, the spectral phase calibration method of polarizer azimuth angle in a kind of ellipsometry system provided by the present invention, it comprises continuous radiation light source, polarizer, sample chamber, analyzer, spectrometer and computer control system; Spectrometer There is a two-dimensional surface array detector; the polarizer and the analyzer are connected with the stepper motor, and the rotation angle is precisely controlled by the computer.
[0075] figure 2 It is a schematic diagram of the optical path layout of the system of the present invention. The light source adopts a continuous radiation light source (such as a xenon lamp), and the light emitted by the light source becomes a quasi-parallel beam after passing through a collimator. 0 On the polarizer, the outgoing linearly polarized light is reflected by the silicon ...
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The invention belongs to the technical field of optical and electronic devices, in particular to a differential spectrum calibration method for the azimuth angle of a polarization element in an ellipsometry system. The principle of the present invention is to analyze the difference spectrum of the elliptical azimuth angle of the two beams of linearly polarized light emitted by the polarizer with the polarized directions perpendicular to each other after passing through a sample with a known dielectric function spectrum, and accurately obtain The azimuth position of the polarizer. The rotatable polarizer and grating spectrometer are used to complete the collection of differential spectral data for more than 200 wavelength points in the 550-650 nm spectral range, analyze and determine the position of the azimuth angle of the polarization element, and complete the calibration process. The invention is verified by the test of Si and Au body materials; it overcomes the shortcomings of the traditional calibration method on the accuracy of the optical constant of the reflective material, the high sensitivity of the detector light intensity, and the poor stability, and can quickly and accurately complete the ellipsometry Calibration of the azimuth angle of the polarization element in the measurement system.
Description
technical field [0001] The invention belongs to the technical field of optical and electronic devices, and in particular relates to a differential spectrum calibration method for the azimuth angle of a polarization element in an ellipsometry system. Background technique [0002] The ellipsometry method is an optical means to obtain information such as optical constants, surface roughness, and film thickness of the measured material by analyzing the change of the polarization state after the probe light interacts with the measured material. Ellipsometry technology has the advantages of high measurement sensitivity, high precision, non-contact, non-destructive, etc., and is widely used in scientific research and manufacturing fields. In the field of scientific research, it can be used to measure the optical properties of materials, that is, the relationship between optical constants and wavelengths (dispersion curve); it can also be used to monitor various conditions on the su...
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IPC IPC(8): G01N21/21G01M11/02
CPCG01M11/0242G01N21/21
Inventor 涂华恬郑玉祥陈良尧张荣君王松有李晶赵海斌杨月梅
Owner FUDAN UNIV