Generalized ellipsometry analysis device based on double-fast-axis adjustable elasto-optical modulation
A technology of elastic-optical modulation and analysis device, which is applied in the field of generalized ellipsometric analysis device, which can solve the problems of measurement beam translation and low measurement accuracy of sample polarization characteristics, and achieve the effect of ensuring accuracy and efficiency and overcoming low measurement rate
Active Publication Date: 2021-06-11
ZHONGBEI UNIV
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[0004] Aiming at the above-mentioned existing generalized ellipsometry device that needs to use a stepping motor mechanical rotation compensator, the rotation compensator is likely to cause the measurement beam to translate during the measurement process, making the measurement accuracy of the sample polarization characteristics not high. The present invention provides a A generalized ellipsometric analysis device based on dual fast-axis adjustable elastic-optic modulation with high measurement accuracy, high efficiency and wide coverage
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[0022] Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.
[0023] A generalized elliptical analysis device based on double fast axis adjustable bullet-transmitting modulation, such as figure 1 As shown, including a collimated light source 1, a polarization generator 2, a sample fixture 3, an instrument rotation table 4, a bias analyzer 5, a spectral measuring system 6, a bulky modulation system control module 7, and a control computer PC8, aziming light source 1 The polarization generator 2, the sample fixture 3, and the sample clamp 3, and the sample fixture 3 are fixed in the opt...
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The invention belongs to the technical field of generalized ellipsometry analysis methods and instruments and equipment, and particularly relates to a generalized ellipsometry analysis device based on double-fast-axis adjustable elasto-optical modulation. A polarization generator and a sample clamp are sequentially arranged in the light path direction of a collimation light source, a sample to be detected is fixed on the sample clamp. The bottom of the sample clamp is rotationally connected with an instrument rotating table, a deflection analyzer and a spectral measurement system are sequentially arranged in the light path direction of the sample to be measured, the spectral measurement system is connected with a control computer PC through a wire, the control computer PC is connected with a elasto-optical modulation system control module, and the elasto-optical modulation system control module is connected with the polarization generator and the deflection analyzer. The device does not need mechanical adjustment, is rapid and accurate, and can provide a new device and a new method for related fields of polarization measurement. The device is used for generalized ellipsometry analysis.
Description
Technical field [0001] The present invention belongs to a generalized elliptical analysis method and instrumentation technology, which relates to a generalized elliptical analysis device based on two quick-axis adjustable bullet-transmitting modulation. Background technique [0002] Conventional elliptical measurement techniques were measured by the polarized state change analysis before and after the polarizing light, realization of a typical uniform sample optical constant and a thickness test analysis of the nanometer level. At present, there are many types of ellipsoles such as rotary defaors, rotary compensators, and phase modulation types, and successful commercialization, where the rotary inspection dialide ellipsometer instrument structure is simpler, low price, However, the phase difference δ measurement range of the elliptical component of this type of instrument can be measured does not exceed 0 ° -180 °, and when δ is near 0 ° or 180 °, the measurement accuracy is low...
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IPC IPC(8): G01N21/21G01N21/01
CPCG01N21/211G01N21/01G01N2021/213
Inventor 李克武王爽王志斌
Owner ZHONGBEI UNIV