Nuclear-irradiation-resistant reinforced high-temperature-resistant resonant quartz temperature sensor

A technology for temperature sensors and anti-nuclear radiation, applied in thermometers, thermometers with directly heat-sensitive electric/magnetic elements, and parts of thermometers, can solve the problem that the resolution, accuracy and long-term stability are not as good as thickness cutting Variable vibration mode, strong anti-nuclear radiation ability, unstable output signal, etc., to achieve the effect of novel working mode, less parasitic vibration mode, and less demanding process error requirements
CN112985632APending Publication Date: 2021-06-18常州奇军苑电子科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
常州奇军苑电子科技有限公司
Publication Date
2021-06-18

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Abstract

The invention discloses a nuclear-irradiation-resistant reinforced high-temperature-resistant resonant quartz temperature sensor, and relates to the field of resonant temperature sensors and is composed of an integrated packaging part and a thermosensitive quartz resonator, the thermosensitive quartz resonator is located inside the integrated packaging part, and the integrated packaging part is composed of a Kovar alloy pipe cap and a Kovar alloy pipe seat, and tungsten copper layers are sputtered on the inner and outer surfaces of the Kovar alloy pipe cap; a surface shear vibration mode and fundamental wave working are adopted by the thermosensitive quartz resonator, m is equal to 0.76 n, m and n are the width and the length of an alloy film oscillation excitation area, the thermosensitive quartz resonator is composed of a first multi-layer special alloy film oscillation excitation area, a second multi-layer special alloy film oscillation excitation area, a first supporting piece, a second supporting piece, a resonance component, a first bus bar electrode and a second bus bar electrode. The quartz temperature sensor has the advantages that the distance between the thermosensitive resonator and the peripheral circuit can be larger than or equal to 5 m, and the quartz temperature sensor is wide in working temperature range, high in accuracy, excellent in linearity, good in long-term stability, high in nuclear radiation resistance and good in high temperature resistance.
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Description

technical field

[0001] The invention relates to the field of resonant temperature sensors, in particular to a high-temperature-resistant resonant quartz temperature sensor with anti-nuclear radiation reinforcement suitable for aviation, aerospace, nuclear industry and conventional weapon industry. Background technique

[0002] The resonant quartz temperature sensor is a novel digital sensor, which has always been famous for its high accuracy, high stability, ultra-high resolution and other excellent characteristics; Type quartz temperature sensor" and CN100555840 "quartz thermal resonator" belong to the category of resonant quartz temperature sensor of thickness shear mode.

[0003] The working mechanism of the resonant quartz temperature sensor is "resonance", and its output signal is frequency; it does not rely on the "resistance" or thermal electromotive force characteristics generated by the sensor's molecular thermal motion, so it not only has excellent thermal sensitiv...

Claims

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