Nuclear-irradiation-resistant reinforced high-temperature-resistant resonant quartz temperature sensor

Abstract

The invention discloses a nuclear-irradiation-resistant reinforced high-temperature-resistant resonant quartz temperature sensor, and relates to the field of resonant temperature sensors and is composed of an integrated packaging part and a thermosensitive quartz resonator, the thermosensitive quartz resonator is located inside the integrated packaging part, and the integrated packaging part is composed of a Kovar alloy pipe cap and a Kovar alloy pipe seat, and tungsten copper layers are sputtered on the inner and outer surfaces of the Kovar alloy pipe cap; a surface shear vibration mode and fundamental wave working are adopted by the thermosensitive quartz resonator, m is equal to 0.76 n, m and n are the width and the length of an alloy film oscillation excitation area, the thermosensitive quartz resonator is composed of a first multi-layer special alloy film oscillation excitation area, a second multi-layer special alloy film oscillation excitation area, a first supporting piece, a second supporting piece, a resonance component, a first bus bar electrode and a second bus bar electrode. The quartz temperature sensor has the advantages that the distance between the thermosensitive resonator and the peripheral circuit can be larger than or equal to 5 m, and the quartz temperature sensor is wide in working temperature range, high in accuracy, excellent in linearity, good in long-term stability, high in nuclear radiation resistance and good in high temperature resistance.

Description

technical field [0001] The invention relates to the field of resonant temperature sensors, in particular to a high-temperature-resistant resonant quartz temperature sensor with anti-nuclear radiation reinforcement suitable for aviation, aerospace, nuclear industry and conventional weapon industry. Background technique [0002] The resonant quartz temperature sensor is a novel digital sensor, which has always been famous for its high accuracy, high stability, ultra-high resolution and other excellent characteristics; Type quartz temperature sensor" and CN100555840 "quartz thermal resonator" belong to the category of resonant quartz temperature sensor of thickness shear mode. [0003] The working mechanism of the resonant quartz temperature sensor is "resonance", and its output signal is frequency; it does not rely on the "resistance" or thermal electromotive force characteristics generated by the sensor's molecular thermal motion, so it not only has excellent thermal sensitiv...

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Problems solved by technology

[0008] 5. There is no temperature drift (accuracy drift caused by ambient temperature changes), time drift, and temperature drift caused by analog circuits (such as A / D converters and amplifiers of platinum resistance thermometers) that are difficult to overcome with traditional sensors (such as platinum resistance thermometers) temperature drift)

[0013] 2. At present, the accuracy and stability of the resonant quartz temperature sensor in a wide operating temperature range need to be improved, especially its high-end temperature range

[0019] Among the three types of resonant quartz temperature sensors, the resolution of the thickness shear vibration mode is the highest, the long-term stability is the best, and the accuracy is the best, but its main disadvantage is the high operating frequency (usually 10-28MHz), usually The distance between the quartz thermal resonator in the thickness shear vibration mode and the peripheral circuit is usually not greater than 500mm, otherwise the output signal is very unstable

[0020] Quartz temperature sensors of tuning fork type (bending vibration mode or torsional vibration mode) and length stretching vibration mode work at frequencies below 1MH Z , the distance between the quartz thermal resonator and the peripheral circuit can be relatively large, up to 5m or more, but their resolution, accuracy and long-term stability are not as good as those of the thickness shear vibration mode

[0021] In short, there is currently no resonant quartz temperature sensor that can meet the low operating frequency requirements (the operating frequency is higher than 1.0MHZ and lower than 2.0MH Z ), high precision, good linearity, high long-term stability, and strong ability to resist nuclear radiation

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