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Device for preparing transmission electron microscope sample through micron-sized fixed-point transfer and preparation method

A transmission electron microscope sample, micron-scale technology, applied in the preparation of test samples, material analysis using radiation, etc., can solve the problems of slow practical process and high cost of lens samples

Active Publication Date: 2021-06-18
SHENZHEN UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0006] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a device and a preparation method for preparing transmission electron microscope samples by micron-scale fixed-point transfer, so as to solve the problem that the cost of obtaining thin film material lens samples in different regions is relatively high and the practical process is relatively slow. slow problem

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  • Device for preparing transmission electron microscope sample through micron-sized fixed-point transfer and preparation method
  • Device for preparing transmission electron microscope sample through micron-sized fixed-point transfer and preparation method
  • Device for preparing transmission electron microscope sample through micron-sized fixed-point transfer and preparation method

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Embodiment Construction

[0060] The present invention provides a device and method for preparing transmission electron microscope samples by micron-scale fixed-point transfer. In order to make the purpose, technical solution and effect of the present invention clearer and clearer, the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0061] In the embodiments and claims, unless the article is specifically limited, "a", "an", "the" and "the" may also include plural forms. If there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. Significance or implicitly indicates the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly includ...

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Abstract

The invention discloses a device for preparing a transmission electron microscope sample through micron-sized fixed-point transfer and a preparation method. The device comprises a base; a three-coordinate displacement table, arranged on the base and used for bearing the thin film material workpiece and adjusting the position of the thin film material workpiece; a probe assembly, arranged on the base and used for preparing the thin film material in the selected thin film area; a collecting assembly, arranged on the base and used for collecting the prepared film material; a manipulator, arranged on the base, connected with the collecting assembly and used for adjusting the position of the collecting assembly; a microscope, arranged right above the probe displacement table and used for observing and amplifying the surface appearance of the prepared thin film material; and a probe displacement table, arranged on the base and used for adjusting the position of the probe assembly. According to the invention, the transmission electron microscope sample can be prepared by fixed-point transfer in a sample micron region, and thin-film material lens samples in different regions can be rapidly obtained, so that the purposes of reducing the preparation cost of the transmission electron microscope sample and improving the preparation efficiency are achieved.

Description

technical field [0001] The invention relates to the technical field of transmission electron microscope sample preparation, in particular to a device and a preparation method for preparing transmission electron microscope samples by micron-scale fixed-point transfer. Background technique [0002] Transmission electron microscope (TEM) uses electron beam imaging through the sample to achieve atomic-scale resolution, and can easily analyze the organization and composition of materials. However, in order to obtain a high-quality TEM For photos, the first thing to do is to prepare a qualified transmission electron microscope sample. [0003] There are many methods for TEM sample preparation, and different methods are mainly selected according to the type of material and the information to be obtained. Usually, there are chemical thinning, electrolytic double spraying, ultrathin sectioning, crushing and grinding, and Focused Ion Beam (FIB ) and other methods, these methods can p...

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Application Information

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IPC IPC(8): G01N1/28G01N23/04
CPCG01N1/28G01N23/04
Inventor 陈成黄志权刁东风
Owner SHENZHEN UNIV