Tomography apparatus for inspecting large samples
A technology of tomography and samples, which is applied in the direction of using optical devices, measuring devices, and phase-influenced characteristic measurements, which can solve the problems of cost, time, and cumbersome inspections.
Pending Publication Date: 2021-06-18
株式会社湖碧驰
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Problems solved by technology
Therefore, when the length of the sample 5 exceeds 100 mm, the inspection of the sample 5 by the optical interference tomography unit 20 cannot be performed at one time.
That is, for a sample with a large area like an instrument panel used in a vehicle, the position of the sample should be moved at least twice to scan the sample, so there is a disadvantage that the inspection of the sample takes a lot of time and is cumbersome.
Method used
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[0020] The present invention will be described in detail below with reference to the accompanying drawings.
[0021] figure 2 and image 3 They are left side and right side perspective views showing the configuration of a tomography apparatus for inspecting a large sample according to an embodiment of the present invention, respectively. like figure 2 and image 3 As shown, the tomography apparatus of the present invention includes two or more optical interference tomography units 30 , 40 (OCT), drive units 32 , 42 (actuator), and a sample mounting unit 50 for performing tomography on the sample 5 . In the present invention, the sample 5 may be a large inspection object whose entire area cannot be inspected by one optical interference tomography unit 30, 40, and may have a three-dimensional structure in which the height of the sample 5 differs depending on the position of the sample 5. For example, a cover glass for an instrument panel of a vehicle whose both ends are be...
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Disclosed is a tomography apparatus capable of non-destructively inspecting the surface and interior of a large sample such as a display for a tablet computer, an instrument panel for a vehicle, and the like. The tomography apparatus includes: two or more light interference tomography units (30, 40) that are sequentially disposed in a line scanning direction of a sample (5) and perform tomography of the sample (5), and that are disposed such that line scanning regions of the respective light interference tomography units (30, 40) partially overlap in the line scanning direction; drive units (32, 42) for adjusting the height of each of the light interference tomography units (30, 40) so that each of the light interference tomography units (30, 40) is separated from the inspection surface of the sample (5) by a predetermined distance; and a sample mounting unit (50) for mounting the sample (5) and transferring the mounted sample (5) in a direction different from the line scanning direction.
Description
technical field [0001] The present invention relates to a tomographic apparatus, and more specifically, to a tomographic apparatus for non-destructively inspecting the surface and interior of a large sample such as a display for a tablet computer or an instrument panel for a vehicle. Background technique [0002] Modern electronic devices such as smartphones, tablets, and dashboards for vehicles are manufactured by laminating various substances such as synthetic resin films, glass substrates, metal components, and pigments into multiple layers. In each manufacturing process of such a multi-layer laminated product, in order to check whether the product is defective such as inflow of external foreign matter, damage, etc., a destructive inspection method of taking a product sample and destroying the sample to visually inspect the product is generally used. However, this method not only has the problem of damaging expensive semi-finished products or finished products, but also h...
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IPC IPC(8): G01N21/45G01N21/17G01N21/88G01B9/02
CPCG01N21/45G01N21/17G01N21/8806G01N21/88G01B9/02091G01N2021/1787
Inventor 刘大源成治侐李庸珍
Owner 株式会社湖碧驰