A detection method of a seed rod shake detection device and a crystal growth method
A crystal growth and detection device technology, applied in crystal growth, single crystal growth, single crystal growth, etc., can solve the problem of inability to detect the vibration of the seed rod
Active Publication Date: 2022-03-08
HANGZHOU FUJIA GALLIUM TECH CO LTD
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is to provide a detection method of a seed rod shake detection device and a crystal growth method for the above-mentioned defects of the prior art, aiming at solving the problem that the seed rod cannot be detected during the crystal growth process in the prior art. the jitter problem
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[0057] In order to make the object, technical solution and advantages of the present invention more clear and definite, the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0058] Please also see Figure 1-Figure 3 , the present invention provides some embodiments of a detection method of a seed rod shaking detection device.
[0059] Such as figure 1 As shown, the seed rod shaking detection device includes:
[0060] A crystal growth device, the crystal growth device is provided with a seed rod, and the crystal growth device is provided with a first window and a second window;
[0061] a laser, the laser is located at a position corresponding to the first window outside the crystal growth device;
[0062] a receiver, the receiver is located at a position c...
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The invention discloses a detection method of a seed rod shaking detection device and a crystal growth method. The detection method includes the steps of: controlling the laser to emit laser light, and obtaining a light spot image sequence corresponding to the seed rod through the receiver; The spot images in the sequence of spot images are spot images within one vibration cycle of the seed rod, and the sequence of spot images includes a first spot image and a second spot image; according to the sequence of spot images, determine the jitter information. Since the light spot image sequence corresponding to the seed rod is obtained through the receiver, the light spot image sequence includes the first light spot image and the second light spot image, and according to the light spot image sequence, the shaking information of the seed rod is obtained, so as to detect the seed crystal during the crystal growth process. Vibration of the rod.
Description
technical field [0001] The invention relates to the technical field of shake detection, in particular to a detection method of a seed rod shake detection device and a crystal growth method. Background technique [0002] In the prior art, when preparing single crystals such as gallium oxide, raw materials such as gallium oxide are first melted, and then a seed rod loaded with a seed crystal is used to pull from the surface of the melt to obtain a single crystal. When preparing gallium oxide single crystals, the seed rod is prone to shaking, resulting in low crystal quality. The vibration of the seed rod during the crystal growth process cannot be detected in the prior art. [0003] Therefore, the prior art still needs to be improved and developed. Contents of the invention [0004] The technical problem to be solved by the present invention is to provide a detection method of a seed rod shake detection device and a crystal growth method in view of the above-mentioned defe...
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IPC IPC(8): C30B15/20C30B29/16
CPCC30B15/20C30B29/16
Inventor 齐红基陈端阳
Owner HANGZHOU FUJIA GALLIUM TECH CO LTD