Test system and test method of vibration sensor
A vibration sensor and testing system technology, applied in the field of sensors, can solve the problems of unclear test calibration of mechanical vibration sensitivity, and achieve the effect of convenient test calibration, convenient testing, and guaranteed reliability
Pending Publication Date: 2021-07-02
无锡韦感半导体有限公司
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Problems solved by technology
[0004] Among them, in the prior art, the test calibration of the air-conducted vibration sensitivity of the vibration sensor can be calibrated with the conventional MEMS microphone test calibration method, but the test calibration of its mechanical vibration sensitivity has not yet been clarified.
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[0029] Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale.
[0030] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0031] figure 1 A schematic diagram of the principle of microphone test calibration according to the prior art is shown;
[0032] Such as figure 1 As shown, the test calibration of the sensitivity of the microphone is carried out in the anechoic chamber 100, and the anechoic chamber 100 includes: a support platform 110, which is used to fix the microphone 10; The height of the fixed microphone 10 is the same; the standard golden microphone 130 is set close to the microphone 10 and can be fixed ...
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The invention provides a test system and test method of a vibration sensor. According to the test method, the test system is adopted for conducting air conduction sensitivity testing and mechanical vibration sensitivity testing on the vibration sensor, the test system comprises a vibration disc, a metal base and a circuit board which are sequentially connected in a hardened and solidified mode, the circuit board comprises a to-be-tested vibration sensor installation position used for installing a to-be-tested vibration sensor, and the vibration disc is connected with a vibration driving device and can vibrate according to driving of the vibration driving device. According to the test system of the vibration sensor, the vibration disc, the metal base and the circuit board are connected in a hardened and solidified mode, the reliability of vibration conduction can be guaranteed, it is guaranteed that vibration received by the to-be-tested vibration sensor installed on the circuit board is consistent with set vibration, the reliability of mechanical vibration sensitivity test is guaranteed, and convenience is provided for the test of the vibration sensor.
Description
technical field [0001] The invention relates to the technical field of sensors, in particular to a testing system and a testing method of a vibration sensor. Background technique [0002] Conventional micro-electromechanical system (Micro-Electro-Mechanical System, MEMS for short) microphones (i.e., silicon microphones) work by conducting sound through air vibration. [0003] When the external environment becomes noisy, the sound information obtained by air vibration conduction is noisy, so the vibration sensor of some microphones is not only sensitive to air conduction vibration, but also to solid vibration conduction vibration. Fixed conduction receives sound information as input. [0004] Wherein, in the prior art, the test calibration of the air-conducted vibration sensitivity of the vibration sensor can be calibrated with the conventional MEMS microphone test calibration method, but the test calibration of the mechanical vibration sensitivity is not yet clear. Conten...
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IPC IPC(8): G01H17/00H04R29/00
CPCG01H17/00H04R29/004
Inventor 孔宪博赵读亮刘新华万蔡辛
Owner 无锡韦感半导体有限公司