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Encoder device, drive device, stage device, and robot device

一种编码器、移动部的技术，应用在测量装置、采用光学装置传递传感构件、采用电/磁装置传递传感构件等方向，能够解决主电源断开等问题

Pending Publication Date: 2021-07-09
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, there are cases where the main power supply of the robot device is turned off when the predetermined process is completed.

Method used

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  • Encoder device, drive device, stage device, and robot device
  • Encoder device, drive device, stage device, and robot device
  • Encoder device, drive device, stage device, and robot device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0034] The first embodiment will be described. figure 1 It is a diagram showing the encoder device EC according to the present embodiment. This encoder device EC detects the rotational position information of the rotation shaft Sf (moving portion) of the motor M (powertrain). The rotating shaft SF is, for example, the rotating shaft (rotor) of the motor M, but may be a power transmitting portion having a transmission or the like and a rotating shaft (output shaft) of the motor M. The rotational position information detected by the encoder device EC is supplied to the motor control unit MC. The motor control unit MC controls the rotation of the motor M using the rotational position information supplied from the encoder device EC. The motor control unit MC controls the rotation of the rotating shaft Sf.

[0035] The encoder device EC includes a position detection system 1 and a power supply system 2. The position detection system 1 detects the rotational position information of the ...

no. 2 approach

[0088] The second embodiment will be described. In the present embodiment, the same configuration as the above-described embodiment is labeled, omitted or simplified. Figure 6 It is a diagram showing the encoder device EC according to the present embodiment. In the present embodiment, the battery 32 includes a primary battery 36 and a secondary battery 37. The motor control unit MC includes a power supply unit MC2, and the secondary battery 37 is charged by the electric power supplied from the power supply portion MC2. The power supply unit MC2, for example, a power supply to the drive of the drive of the rotary shaft Sf (moving portion), supplies power to the motor M. The secondary battery 37 may also be charged from the power supply unit MC2 to receive power from the power supply unit MC2 by the power supply unit MC2 to supply power to the motor M (for example, the main power source is turned on). Further, at least a portion of the electricity battery 37 is generated by the elec...

no. 3 approach

[0097] A third embodiment will be described. In the present embodiment, the same configuration as the above-described embodiment is labeled, omitted or simplified. Figure 8 It is a diagram showing the encoder device EC according to the present embodiment. The rotational position information of the multi-rotating information detecting unit 3 on the rotation axis Sf (moving portion) is magnetically detected in the first embodiment, and in the present embodiment, it is optically detected.

[0098] The multi-rotating information detecting unit 3 includes a dial disk S, a light-emitting element 21 (irradiation portion), and a light receiving sensor 22 (photodetector).

[0099] The scale disk S is bound to the rotating shaft Sf. The light-emitting element 21 is irradiated with the tick disk S. In a state where the supply element 21 is disconnected in a state where the power from the external power from the encoder device EC is disconnected, the light is irradiated using the power suppli...

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PUM

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Abstract

The invention provides an encoder apparatus, a drive device, a stage device and a robot device capable of reducing frequency of maintenance of a battery. The encoder apparatus (EC) includes: a position detection system (1) including a detector (13, 23) that detects position information on a mover (SF); an electric signal generator (31) that generates an electric signal in response to movement of the mover; and a battery (32) that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.

Description

[0001] The present application is named "Encoder device, drive unit, stage device and robotic device". The International Application Day is January 2017, the international application number is PCT / JP2017 / 000284, the national application number is 201780006980.8 Application for Patent Application. Technical field [0002] The present invention relates to an encoder device, a drive device, a stage device, and a robot device. Background technique [0003] A multi-rotate encoder device that distinguishes the number of rotation of the shaft is mounted on various devices such as robotic devices (for example, Patent Document 1 below). In the operation of the robot device, for example, the encoder device receives a power supply from the main power source of the robot, for a rotational position information including a multi-rotating information indicating the number of rotation and an angular position information indicating the angular position of the ring. Perform testing. [0004] H...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/22
CPCG01D5/2291B25J19/02G01D5/145G01D5/24447G01D5/56G01D5/58G01D5/3473G01D2205/26G01D5/34715
Inventor 后藤雅彦
Owner NIKON CORP
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