Rotating table rotating shaft error measurement and correction method based on displacement sensor
A displacement sensor, rotary table technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of complex measurement process, limited rotation axis error measurement and correction accuracy and application range, rotation angle error, etc., to achieve the effect of simple measurement application
Active Publication Date: 2021-07-30
INST OF HIGH ENERGY PHYSICS CHINESE ACADEMY OF SCI
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However, these methods have certain limitations. Both the inversion method and the multi-step method need to rotate the standard part and the displacement sensor one or more times relative to the rotary table. The measurement process is complicated and not suitable for real-time online measurement. , the additional rotation operation is also easy to introduce additional errors such as the rotation angle
The multi-point method can perform real-time measurement by adding multiple measurement sensors, but its separation algorithm will have unavoidable harmonic errors
[0005] The problems existing in the above rotating shaft error measurement methods limit the accuracy and application range of rotating shaft error measurement and correction
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[0033] The present invention is described below with a specific example.
[0034] Such as image 3 As shown, in the embodiment of the present invention, a disk with a radius R fixed on the turntable is used as a standard part for measurement, and five displacement sensors (S1-S5) are used to measure the position of the standard part. 5 displacement sensors such as Figure 4As shown in the installation, S1~S3 is at an interval of 120 degrees, in which S1 is located on the y-axis and is installed on the circumference of the bottom surface of the disc with the radius r as the radius. S4 and S5 are installed on the side of the disc standard part at an interval of 90 degrees. S4 and S5 on the y-axis and x-axis, respectively. The vertical distance between the bottom surface of the disk and the endpoint of the rotating shaft is h. According to the position p of the end point of the rotating shaft and the measured value s=(s 1 ,s 2 ,s 3 ,s 4 ,s 5 ) can be written as formula (1...
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The invention discloses a rotating table rotating shaft error measurement and correction method based on a displacement sensor. The measuring method comprises the following steps of: 1) fixing a standard component on a rotating surface of a rotating table, and arranging N fixed displacement sensors; 2) controlling the rotation of the rotary table, performing one-time rotation of the rotary table to perform calibration measurement, and calculating a constant error part f(epsilon theta) at the same rotation angle according to the position of the shaft end point when the rotation angle is theta during calibration and the measured value of the displacement sensor when the rotation angle is theta during calibration, wherein ctheta is a calibration parameter when the rotation angle is theta; and (3) controlling the rotating table to rotate, recording the real-time measurement value of each displacement sensor, and then determining the error of the rotating shaft according to the calculated shaft end point position.
Description
technical field [0001] The invention relates to a method for calibrating the rotation axis deviation of a rotary table, in particular to a method for measuring and correcting the rotation axis error based on a displacement sensor. Background technique [0002] The rotary table is the main component of mechanical instruments, which provides the function of rotary motion for measurement, processing, control and other equipment, and has important applications in the fields of confidential machinery manufacturing, optical analysis, CT imaging and so on. Due to the influence of machining, assembly accuracy, thermal deformation and other factors, there are inevitably different degrees of rotation axis deviation when the rotary table moves, which has an important impact on the movement accuracy of mechanical equipment. Therefore, the measurement of the deviation of the rotating shaft is of great significance to the selection of the turntable equipment, the analysis of the movement ...
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CPCG01B21/00
Inventor 王研张凯袁清习黄万霞何其利张锦姚春霞付天宇
Owner INST OF HIGH ENERGY PHYSICS CHINESE ACADEMY OF SCI