Gas supply system and manufacturing method thereof

An air supply system and air outlet technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve problems such as uneven air supply, improve substrate quality, uniform air supply, and improve air supply. The effect of efficiency

Inactive Publication Date: 2021-08-17
深圳市创基真空科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to improve the problem of uneven gas supply, the application provides a gas supply system and its manufacturing method

Method used

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  • Gas supply system and manufacturing method thereof
  • Gas supply system and manufacturing method thereof
  • Gas supply system and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] refer to figure 1 , the air supply system includes an inner pipe 1 and an outer pipe 2, and the outer pipe 2 is sleeved outside the inner pipe 1. Gas is passed into the inner tube 1, and the gas can flow out through the outer tube 2.

[0055] refer to figure 2 , the inner tube 1 is a round tube, one end of the inner tube 1 is closed, and the other end is open, which is used for ventilating the inner tube 1 . The outer wall of the inner tube 1 is provided with an air inlet 11, the air inlet 11 is opened in the middle of one side of the inner tube 1, the air inlet 11 runs through the side wall of the inner tube 1, and communicates with the inside of the inner tube 1.

[0056] The outer wall of the inner tube 1 is provided with an air inlet groove 12, and the air inlet groove 12 is opened in the middle of the inner pipe 1. The length direction of the air inlet groove 12 is perpendicular to the length direction of the inner pipe 1, and one end of the air inlet groove 12 ...

Embodiment 2

[0068] refer to Figure 4 The difference between this embodiment and embodiment 1 is that in this embodiment, the inner pipe 1 and the outer pipe 2 are square pipes, the air inlet 11 and the air inlet groove 12 are set on one side of the inner pipe 1, and the three A groove unit 131 is provided on a side adjacent to this side of the inner pipe 1 , and an air outlet 21 is provided on a side of the outer pipe 2 . The advantage of setting the inner pipe 1 and the outer pipe 2 as square pipes is that it is convenient to process the air inlet 11 , the air inlet groove 12 and the groove unit 131 on the inner pipe 1 .

[0069] In Embodiment 1 and the present embodiment, the inner tube 1 and the outer tube 2 are respectively round tubes or square tubes. In other embodiments, the inner tube 1 and the outer tube 2 can also be tubes of other shapes, such as triangular tubes, polygonal Tubes, not limited to round tubes and square tubes.

[0070] The implementation principle of embodimen...

Embodiment 3

[0072] refer to Figure 5 The difference between this embodiment and Embodiment 1 is that there are seven trench units 131 in this embodiment. Air intake groove 12 is far away from air inlet 11 (intake groove 12 and air inlet 11 see figure 2 ) one end is connected to a groove unit 131, and the end of the groove unit 131 away from the air inlet groove 12 is connected to two groove units 131, and the ends of the two groove units 131 away from the previous groove unit 131 are respectively connected to two groove units 131.

[0073] Correspondingly, there are eight air outlets 21 in this embodiment, and the eight air outlets 21 are arranged along the length direction of the outer tube 2, and the eight air outlets 21 are connected to the four second grooves 1312 away from the air inlet groove 12 respectively. It corresponds to one end of the first groove 1311 . In this embodiment, the number of gas outlets 21 is increased, which is conducive to more dispersed and uniform flow o...

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PUM

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Abstract

The invention relates to the field of vacuum gas distribution, in particular to a gas supply system and a manufacturing method thereof. The gas supply system comprises an inner pipe and an outer pipe with which the inner pipe is sleeved, wherein the inner pipe is attached to the outer pipe; a ventilation groove is formed in the outer wall of the inner pipe; an air inlet is formed in the inner pipe; at least two air outlets are formed in the outer pipe; one end of the ventilation groove is communicated with the air inlet, and the other end of the ventilation groove is communicated with the air outlets; and ventilation channels formed between the air inlet and the air outlets in the ventilation groove are equal in length. According to the gas supply system, gas supply is more uniform, and the effect of improving the quality of a base body is achieved.

Description

technical field [0001] The present application relates to the field of vacuum air distribution, in particular to an air supply system and a manufacturing method thereof. Background technique [0002] Vacuum coating refers to a method in which metals or metal oxides become gaseous atoms or molecules in a vacuum environment and are deposited on metal or non-metal surfaces to form thin films. Vacuum coating is widely used in the protection of molds. Coatings can assist mold heat dissipation, prolong mold service life, increase release performance and molding rate, and improve product yield, etc. [0003] Vacuum coating methods include cathode sputtering coating method. In this method, the target material as a film is placed on the cathode, the substrate to be coated is placed on the opposite side of the cathode, and an inert gas such as argon is passed into the vacuumed room to keep The pressure is about 1.33-13.30Pa, and then the cathode is connected to a 2000V DC power suppl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34
CPCC23C14/34C23C14/228
Inventor 张德军杨武华
Owner 深圳市创基真空科技有限公司
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