Selective contact area buried solar cell and back contact structure thereof
A technology of solar cells and back contacts, which is applied in the field of solar cells, can solve problems such as high requirements for groove width control and poor passivation effect, and achieve high requirements for groove width control, loose width control requirements, and reduced leakage current Effect
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Embodiment 1
[0085] The first embodiment of the present invention provides a back contact structure of a solar cell. For the convenience of description, only the parts related to the embodiment of the present invention are shown. Refer to Figure 1-Figure 13 As shown, the back contact structure of the solar cell provided by the embodiment of the present invention includes:
[0086] Grooves arranged at intervals on the back side of the silicon substrate 10;
[0087] Alternately arranged first conductive regions 20 and second conductive regions 30, one of which is arranged in the groove, and the other is arranged outside the groove, the first conductive region 20 includes the first dielectric layer 21 and the second conductive region arranged in sequence a doped region 22, the second conductive region 30 includes the second doped region;
[0088] A second dielectric layer 40 disposed between the first conductive region 20 and the second conductive region 30, the second dielectric layer 40 i...
Embodiment 2
[0131] The second embodiment of the present invention provides a selective contact area buried solar cell. For the convenience of description, only the parts related to the embodiment of the present invention are shown. Refer to Figure 1-Figure 13 As shown, the selective contact area buried solar cell provided by the embodiment of the present invention includes:
[0132] silicon substrate 10;
[0133] The back contact structure described in the foregoing embodiments on the back side of the silicon substrate 10; and
[0134] The third dielectric layer 70 is disposed on the front surface of the silicon substrate 10 .
[0135] Further, in one embodiment of the present invention, the second dielectric layer 40 and the third dielectric layer 70 can be prepared by preparing the front and back sides of the silicon substrate 10 respectively through the same process, and at this time, the third dielectric layer 70 can be The structure is the same as that of the second dielectric lay...
Embodiment 3
[0142] The third embodiment of the present invention provides a method for fabricating a selective contact region buried solar cell. For the convenience of description, only the parts related to the embodiment of the present invention are shown. Refer to Figure 14 As shown, the selective contact region buried solar cell manufacturing method provided in the embodiment of the present invention is used to prepare the selective contact region buried solar cell as described in the foregoing embodiments. Specifically, the method includes:
[0143] Step S11, creating a plurality of grooves arranged at intervals on the back surface of the silicon substrate;
[0144] Wherein, before step S11, it should also include preprocessing the silicon substrate;
[0145] The above pretreatment includes cleaning the silicon substrate and removing the damaged layer. Specifically, including:
[0146] (1) RCA standard cleaning, remove particles and organic matter on the surface of the silicon subs...
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