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Solar cell and preparation method thereof

A technology for solar cells and conductive regions, applied in the field of solar cells, which can solve the problems of poor preparation of hard masks and high requirements for groove width control, and achieve the effects of simple alignment, loose width control requirements, and reduced impurity pollution

Pending Publication Date: 2021-09-24
ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the embodiments of the present invention is to provide a solar cell manufacturing method, which aims to solve the existing problems of high requirements for groove width control and poor manufacturing effect of hard masks.

Method used

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  • Solar cell and preparation method thereof
  • Solar cell and preparation method thereof

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Embodiment 1

[0051] The first embodiment of the present invention provides a solar cell manufacturing method. For the convenience of description, only the parts related to the embodiment of the present invention are shown. Refer to figure 1 As shown, the solar cell preparation method provided by the embodiment of the present invention includes:

[0052] Step S10, preparing grooves: opening a plurality of grooves arranged at intervals on the back surface of the silicon substrate;

[0053] Wherein, before step S10, it should also include preprocessing the silicon substrate;

[0054] The above pretreatment includes cleaning the silicon substrate and removing the damaged layer. Specifically, including:

[0055] (1) RCA standard cleaning, remove particles and organic matter on the surface of the silicon substrate;

[0056] (2) After the silicon substrate is cleaned, put it into 2-5% KOH alkali solution (potassium hydroxide) or TMAH solution (tetramethylammonium hydroxide, ie developer), the ...

Embodiment 2

[0118] The second embodiment of the present invention provides a solar cell. For the convenience of description, only the parts related to the embodiment of the present invention are shown. Refer to Figure 2-Figure 8 As shown, the solar cell provided by the embodiment of the present invention includes:

[0119] A silicon substrate 10, the back of the silicon substrate 10 is provided with grooves arranged at intervals;

[0120] A front dielectric layer 20 disposed on the front side of the silicon substrate 10;

[0121] The first conductive region 30 in the target groove region and the second conductive region 40 in the non-target groove region are arranged on the back side of the silicon substrate 10, and the non-target groove region is the land area between each groove or the In the groove region adjacent to the target groove region, the first conductive region 30 and the second conductive region 40 include a passivation contact structure composed of a tunneling layer and a ...

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Abstract

The invention is suitable for the technical field of solar cells, and provides a solar cell and a preparation method thereof, and the method comprises the steps: preparing grooves: forming a plurality of grooves in the back surface of a silicon substrate at intervals; preparing conducting regions: preparing a first conducting region in a target groove region through a hard mask, and preparing a second conducting region in a non-target groove region through a hard mask, wherein the first conducting region and the second conducting region comprise a passivation contact structure composed of a tunneling layer and a doping layer or a diffusion structure composed of the doping layer; preparing a dielectric layer: preparing a front dielectric layer on the front surface of the silicon substrate, and preparing a back dielectric layer on the back surface of the silicon substrate; and preparing conductive layers: preparing a first conductive layer on the back surface of the silicon substrate at a position corresponding to the first conductive region, and preparing a second conductive layer on the back surface of the silicon substrate at a position corresponding to the second conductive region. According to the solar cell preparation method provided by the invention, the problems of high control requirement on the width of the groove and poor preparation effect by adopting a hard mask in the prior art are solved.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a solar cell and a preparation method thereof. Background technique [0002] At present, in a conventional solar cell, the emitter contact electrode and the base contact electrode are respectively located on the front and back sides of the battery sheet. The front of the battery is the light-receiving surface, and the coverage of the metal emitter contact electrode on the front will inevitably cause a part of the incident sunlight to be reflected and blocked by the metal electrode, resulting in a part of optical loss. The back-contact solar cell is a battery in which both the emitter and base contact electrodes are placed on the back of the battery (non-light-receiving surface). The light-receiving surface of the battery is not blocked by any metal electrodes, thereby effectively increasing the short-circuit current of the cell. At the same time, the back side ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L31/0224H01L31/0352H01L31/068
CPCH01L31/1804H01L31/022441H01L31/022458H01L31/035272H01L31/0682Y02P70/50Y02E10/547
Inventor 邱开富王永谦杨新强陈刚
Owner ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD
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