Manufacturing method of curved-surface special-shaped MEMS two-dimensional scanning micro-mirror machine

Abstract

The invention provides a curved-surface special-shaped MEMS two-dimensional scanning micro-mirror which comprises an outer frame, an inner frame, a coil, a curved-surface mirror surface, a fast axis and a slow axis. The curved-surface mirror surface is located in the center of the overall structure and connected with the inner frame through the fast axis, and the inner frame is connected with the outer frame through the slow axis. The curved-surface mirror surface adopts a spherical crown surface and is a curved surface left after a spherical surface is cut by a plane. The coil is built-in, an external permanent magnet provides a magnetic field forming a 45-degree angle with the micro-mirror, torsion of torsion arm beams of the fast axis and the slow axis is controlled through the Lorentz force in the Z direction, and scanning of the slow axis and the fast axis, namely the Y axis and the X axis, is realized. Under the control of electromagnetic force, the curved-surface special-shaped two-dimensional scanning micro-mirror realizes periodical and high-frequency swing on the X axis and the Y axis. According to the MEMS two-dimensional scanning micro-mirror, a curved-surface special-shaped structure is adopted, a plane mirror is replaced by a curved-surface mirror, the scanning view field of the MEMS two-dimensional scanning micro-mirror is greatly increased, and the scanning angle of a laser radar is increased.

Description

technical field [0001] The invention relates to micro-electromechanical system technology, in particular to a curved-surface special-shaped MEMS two-dimensional scanning micromirror and a preparation method thereof. Background technique [0002] MEMS micromirror refers to an optical MEMS device that is manufactured by optical MEMS technology and integrates a micro-optical mirror and a MEMS driver. Compared with the traditional scanning mirror, the MEMS two-dimensional scanning micromirror, as the core component of the new generation of three-dimensional imaging lidar, has the advantages of small size, low cost, high scanning frequency, fast response speed and low power consumption, and is widely used in optical Communications, scanning imaging, lidar and other fields. [0003] The reflector surface of the traditional MEMS two-dimensional scanning micromirror adopts a plane mirror, which is limited by the rigidity limit and reliability of the rotating beam of the MEMS scanni...

AI Technical Summary

Problems solved by technology

[0003] The reflector surface of the traditional MEMS two-dimensional scanning micromirror adopts a plane mirror, which is limited by the rigidity limit and reliability of the rotating beam of the MEMS scanning micromirror. Compared with the rotary lidar, the scanning angle of the MEMS scanning micromirror is smaller, which greatly Restricts the application of a new generation of 3D imaging lidar

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