A kind of laser and its manufacturing method and application
A laser, the first technology, applied in the laser field, can solve problems such as semi-insulating substrate crystal defects, VCSEL array quality degradation, etc.
Active Publication Date: 2022-06-07
VERTILITE CO LTD
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Problems solved by technology
[0004] In some applications, VCSEL arrays need to be electrically isolated from other VCSEL arrays on the same substrate, so semi-insulating substrates are often used, but semi-insulating substrates have more crystal defects, thus resulting in lower quality of the VCSEL array
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[0050] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
[0051] It should be noted that the diagrams provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, and the drawings only show the components related to the present invention rather than the number, shape and number of components in actual implementation. For dimension drawing, the type, quantity and proportion of each component can be changed at will in actual implementation, and the ...
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Abstract
The present invention proposes a laser and its manufacturing method and application, including: a substrate; at least two light-emitting arrays arranged on the substrate, the light-emitting arrays include at least two light-emitting units, at least two of the light-emitting units connected in series; the isolation structure is set on the substrate and located between at least two of the light-emitting arrays, and the isolation structure is used to electrically isolate at least two of the light-emitting arrays; wherein, the light-emitting arrays include: The first reflective layer is disposed on the substrate, the first reflective layer includes at least one first semiconductor layer, the first semiconductor layer is in contact with the substrate, and the ion doping of the first semiconductor layer The impurity type is opposite to the ion doping type of the substrate, and the first semiconductor layer is used to electrically isolate the light emitting array from the substrate. The invention can improve the quality and reliability of the laser.
Description
technical field [0001] The present invention relates to the field of laser technology, and in particular, to a laser and its manufacturing method and application. Background technique [0002] Vertical Cavity Surface Emitting Laser (VCSEL) is developed based on gallium arsenide semiconductor material, which is different from other light sources such as LED (Light Emitting Diode) and LD (Laser Diode, laser diode). It has the advantages of circular output light spot, single longitudinal mode output, small threshold current, low price, and easy integration into a large-area array, and is widely used in optical communication, optical interconnection, optical storage and other fields. [0003] Since its inception, VCSELs have been used as the core device for a new generation of optical storage and optical communication applications, providing a new way for the needs of the Internet and the continuous improvement of optical storage density. With the in-depth research of VCSEL and...
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IPC IPC(8): H01S5/183H01S5/20H01S5/42
CPCH01S5/183H01S5/2009H01S5/423
Inventor 张成刘嵩梁栋
Owner VERTILITE CO LTD