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Calibration method and device of CMM probe system

A calibration method and technology of calibration device, which can be applied to measurement devices, instruments, etc., can solve complex and cumbersome problems, and achieve the effect of simplifying the complexity of calibration

Inactive Publication Date: 2021-09-28
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since most of the workplaces that require the use of probes for processing or measurement are occasions that require high precision, frequent replacement of high-precision probes is required, so it is necessary to perform high-precision probe calibration many times
However, the existing probe calibration process is a relatively cumbersome and complicated process.

Method used

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  • Calibration method and device of CMM probe system
  • Calibration method and device of CMM probe system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] see figure 1 , a flow chart of the steps of the calibration method of the CMM probe system provided in Embodiment 1 of the present application, including the following steps:

[0030] Step S110: providing a probe, the probe is installed on the probe working platform, and the probe includes a flexible sheet;

[0031] Step S120: installing a laser sensor on the probe working platform, and aiming the laser beam emitted by the laser sensor at the apex of the probe.

[0032] In some of the embodiments, there are three laser sensors, and they are respectively installed on the probe working platform so as to be perpendicular to each other.

[0033] In some of the embodiments, a plane mirror is installed on the probe working platform, and the plane mirror can aim the laser beam emitted by the laser sensor at the apex of the probe.

[0034] Step S130: installing a standard target ball on the probe working platform, and fitting the position of the standard target ball by adjust...

Embodiment 2

[0042] see figure 2 , is a schematic diagram of the principle of the calibration device of the CMM probe system provided in Embodiment 2 of the present application, including: a probe working platform, a probe installed on the probe working platform, the probe includes a flexible sheet, an installation The laser sensor on the probe working platform, the laser beam emitted by the laser sensor is aimed at the apex of the probe and the standard target ball installed on the probe working platform, by adjusting the three degrees of freedom The motion platform can fit the position of the standard target ball.

[0043] By adjusting the contact between the probe and the standard target ball in different directions, the laser sensor senses the displacement of the flexible sheet to establish a set of coordinate change equations, and solve the coordinates by means of least squares fitting. Change the coordinate transformation matrix in the equation, and then obtain the deformation amou...

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Abstract

According to a calibration method and device of the CMM probe system, a laser sensor is installed on a probe working platform, and a laser beam emitted by the laser sensor is aligned at the vertex of a probe; a standard target ball is installed on the probe working platform, and the position of the standard target ball is fit by adjusting the three-degree-of-freedom motion platform; the probe and the standard target ball are adjusted to touch in different directions, so that the laser sensor senses the displacement of the flexible sheet body, and a coordinate change equation set is established; and a coordinate transformation matrix in the coordinate change equation is solved through a least square fitting mode, and then the deformation amount of the probe in the process of detecting the detected object is obtained. The absolute position and direction of the probe ball do not need to be considered, the surface features and geometric features of the detected object only need to be determined according to the relative position and direction, the calibration complexity is simplified, and the six-degree-of-freedom displacement change of the probe can be effectively measured by using the standard ball, so that the measurement of a measurement coordinate point is realized, and the rapid calibration work of the probe is completed.

Description

technical field [0001] The invention belongs to a high-precision three-coordinate measurement system, and in particular relates to a calibration method and a calibration device for a CMM probe system. Background technique [0002] Probes used in high-precision three-coordinate measurement systems often require high manufacturing accuracy. In addition, most probes are calibrated by fitting the center of the sphere and double-target calibration. This method can well calibrate the probe’s The actual position and direction of the center of the sphere. However, since most of the workplaces that require the use of probes for processing or measurement are occasions that require high precision, frequent replacement of high-precision probes is required, so multiple high-precision probe calibrations are required. However, the existing probe calibration process is a relatively tedious and complicated process. Contents of the invention [0003] In view of this, it is necessary to pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/00
CPCG01B21/00
Inventor 国鑫王辉周烽金春水
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI