Optical displacement sensor
A displacement sensor, optical technology, applied in the direction of optics, using optical devices to transmit sensing components, optical elements, etc., can solve the problem of high cost
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no. 1 example
[0065] In the following, reference will be made to Figure 1 to Figure 6 A first embodiment of the present invention is described.
[0066] figure 1 is a perspective view showing the optical displacement sensor 1 according to the first embodiment. Figure 2A to Figure 2C is a schematic diagram showing the optical path of light when the optical displacement sensor 1 is an angle sensor. specifically, Figure 2A The state before the object to be measured is rotated in the optical displacement sensor 1 is shown. Figure 2B and 2C A state in which the object to be measured is rotated in a predetermined direction in the optical displacement sensor 1 is shown.
[0067] Such as figure 1 as well as Figure 2A to Figure 2C As shown, the optical displacement sensor 1 includes: a diffraction unit 2 having a diffraction grating M; a light source 3 for radiating light to the diffraction unit 2 ; and a light receiving unit 4 for receiving light that has passed through the diffractio...
no. 2 example
[0131] In the following, reference will be made to Figure 7 and Figure 8 A second embodiment of the present invention is described. Portions that have already been described will be denoted by the same reference numerals, and descriptions thereof will be omitted in the following description.
[0132] Figure 7 is a schematic diagram showing an optical displacement sensor 1A according to the second embodiment.
[0133] In the first embodiment, the reflective units 5, 5a, 5b in the optical displacement sensors 1, 1a to 1c are divided by the dividing unit 20 and the first light and the second light that have passed through the diffraction unit 2 are sent from the first reflecting part 51 . , 51b. Furthermore, the reflection unit 5, 5a, 5b is a prism, which is a single optical component.
[0134] The optical displacement sensor 1A in the second embodiment is different from the first embodiment in that the retroreflection unit 6 is not provided, and the reflection unit 5A i...
no. 3 example
[0153] In the following, reference will be made to Figure 9 and Figure 10 A third embodiment of the present invention is described. Portions that have already been described will be denoted by the same reference numerals, and descriptions thereof will be omitted in the following description.
[0154] Figure 9 is a perspective view showing the optical displacement sensor 1B according to the third embodiment.
[0155] Such as Figure 9 As shown, the difference between the third embodiment and the first embodiment is that the division unit 20B in the optical displacement sensor 1B is a polarization beam splitter like the second embodiment, and the difference from the second embodiment is that , as in the first embodiment, the reflective unit 5 is a prism, which is a single optical component.
[0156] In addition, the optical displacement sensor 1B differs from the first and second embodiments in that it includes a total reflection unit 10 that totally reflects the first l...
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