Fault detection method and device, terminal equipment and storage medium

A fault detection and fault technology, applied in the direction of instruments, character and pattern recognition, electrical components, etc., can solve the problems of missing features, affecting the detection accuracy of fault detection, etc., to avoid loss, improve fault detection accuracy, and reduce dependencies.

Inactive Publication Date: 2021-10-22
深圳市信润富联数字科技有限公司
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] The main purpose of the present invention is to provide a fault detection method, device, terminal equipment and storage medium, aiming to solve the technical problem of manual feature extraction in the fault detection method in the semiconductor manufacturing process, resulting in loss of features and affecting the accuracy of fault detection

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  • Fault detection method and device, terminal equipment and storage medium
  • Fault detection method and device, terminal equipment and storage medium
  • Fault detection method and device, terminal equipment and storage medium

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Embodiment Construction

[0038] It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0039] In the following description, use of suffixes such as 'module', 'part' or 'unit' for denoting elements is only for facilitating description of the present invention and has no specific meaning by itself. Therefore, 'module', 'part' or 'unit' may be used in combination.

[0040] The fault detection terminal (also called terminal, device or terminal device) of the embodiment of the present invention may be a PC, or a mobile terminal device with data processing and display functions such as a smart phone, a tablet computer, and a portable computer.

[0041] like figure 1 As shown, the terminal may include: a processor 1001 , such as a CPU, a network interface 1004 , a user interface 1003 , a memory 1005 , and a communication bus 1002 . Wherein, the communication bus 1002 is used to realize connection and communi...

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Abstract

The invention discloses a fault detection method and device, terminal equipment and a storage medium. The method is used for detecting a fault in a semiconductor wafer manufacturing process, and comprises the steps: obtaining monitoring signal data in a semiconductor wafer manufacturing process; performing feature extraction on the monitoring signal data to obtain a target general signal in the semiconductor wafer manufacturing process; and detecting whether a fault exists in the semiconductor wafer manufacturing process according to the target general signal. According to the method, full-automatic feature extraction of signal data collected in the semiconductor wafer manufacturing process can be achieved, dependence on expert experience in fault detection is reduced, key features of monitoring signal data in the semiconductor manufacturing process can be reserved through the extracted target summarized signal, and feature information is prevented from being lost, so that the fault detection precision in the semiconductor manufacturing process is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a fault detection method, device, terminal equipment and storage medium. Background technique [0002] With the continuous development of sensors and information technology, the modern semiconductor industry mostly uses advanced process control to monitor the production process and production equipment to determine whether there is a fault in the semiconductor production process, and then initially judge whether the manufactured semiconductor is qualified. However, due to the complexity and dynamics of the semiconductor manufacturing process, the existing fault detection methods rely too much on expert experience when modeling, and require manual processing and feature extraction of the collected data, which is not only time-consuming but also extremely costly. Furthermore, conventional feature extraction methods based on expert experience will inevitably caus...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67G06K9/00G06K9/46
CPCH01L21/67253G06F2218/08
Inventor 冯建设花霖陈军杨欢刘桂芬张挺军周文明姚琪杨志宇覃江威
Owner 深圳市信润富联数字科技有限公司
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