MCM packaging structure and manufacturing method thereof
A technology of packaging structure and manufacturing method, which is applied in the fields of semiconductor/solid-state device manufacturing, electrical components, and electric-solid-state devices, etc., can solve problems such as affecting product performance and restricting product miniaturization.
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[0093] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0094] figure 1 is a schematic cross-sectional structure diagram of the MCM package structure of the first embodiment of the present invention.
[0095] refer to figure 1 As shown, the MCM package structure 1 includes:
[0096] The first die 11 includes a plurality of first pads 111, the first pads 111 are located on the active surface 11a of the first die 11; the first die 11 is provided with a receiving groove 110, and the opening of the receiving groove 110 is located the back side 11b of the sheet 11;
[0097] The second die 12 includes a plurality of second pads 121, and the second pad 121 is located on the active surface 12a of the second die 12; The die 11 is fixed, and the active surface 12a of the second die 12 faces away from...
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Abstract
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