Small-carrier flat-four-side pin-less packaging part and preparation method thereof
A leadless package and four-sided flat technology, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of restricting product profit margins, long bonding wire length, and high bonding wire cost
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Embodiment 1
[0057] 1. Thinning and scribing
[0058] Thinning thickness is 50μm, stack package, roughness Ra 0.10mm.
[0059] 8″ wafer thickness reduction: DR3000III / NITI0 for placement machine,
[0060] 8″ thinning machine: PG300RM / TSN. Thickness gauge DH151 / TSK;
[0061] 8″ dicing machine: WD300TXB, DR3000III / TSK for SMT.
[0062] Anti-separation layer, anti-shards process scribing.
[0063] 2. Core loading
[0064] 8″ choose AD829 or AD889 core loading machine;
[0065] Adhesive film is used as the bonding material, and the lead frame is a four-sided flat leadless frame with double rows of pins, and the film baking process is used.
[0066] 3. Pressure welding
[0067] ESEC3100 and Eagle60 bonding machines are selected, and gold wire is used as the welding wire material. Since the thickness of the package is 0.75, the pressure welding adopts the ultra-low-line arc pressure welding process, and the high-low arc positive and negative bonding method avoids the phenomenon of cross-wi...
Embodiment 2
[0080] 1. Thinning and scribing
[0081] Thinning thickness 200μm stacked package, roughness Ra 0.05mm.
[0082] 12″wafer thickness reduction: DR3000III / NITIO for placement machine,
[0083] 12″ thinning machine: PG300RM / TSN. Thickness gauge DH151 / TSK;
[0084] 12″ dicing machine: WD300TXB, DR3000III / TSK for SMT,
[0085] Anti-separation layer, anti-shards process scribing.
[0086] 2. Core loading
[0087] 12″ choose DB-700FC / Jupei chip bonder.
[0088] Adhesive film material: Insulating film is used, the lead frame is a four-sided flat leadless frame with double rows of pins, and the film baking process is used.
[0089] 3. Pressure welding
[0090] Eagle60 bonding machine is used for pressure welding, copper wire is used for welding wire material, ultra-low arc pressure welding process is adopted for pressure welding, and high and low arc positive and negative welding methods are used to avoid wire crossing and broken wires. The inner row of pins adopts low arc weldi...
Embodiment 3
[0104] 1. Thinning and scribing
[0105] According to the thickness of the packaged product, the thinning thickness is determined to be 100 μm, and the roughness is controlled at Ra 0.08mm.
[0106] 8″ wafer thickness reduction: DR3000III / NITI0 for placement machine,
[0107] 8″ thinning machine: PG300RM / TSN. Thickness gauge DH151 / TSK;
[0108] 8″ dicing machine: WD300TXB, DR3000III / TSK for SMT.
[0109] Anti-separation layer, anti-shards process scribing.
[0110] Other processes are the same as in Example 1.
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