Modeling method for hysteresis characteristics of small-stroke nanometer motion platform based on forward recursion

Abstract

The invention discloses a modeling method for hysteresis characteristics of a small-stroke nanometer motion platform based on forward recursion, and belongs to the technical field of ultra-precision motion control. The modeling process comprises four parts of sampling data acquisition, model construction, algorithm solution and result output, the sampling data acquisition method is described in a small-stroke nanoscale motion table and thermal correlation hysteresis data measurement method, and current-force correlation data acquisition under different temperature and different displacement conditions is acquired; the model construction part comprises primary function determination and model structure and parameter determination; the algorithm solving part comprises initial condition setting, RBF network construction, RBF center number determination and weight output. According to the method, model parameters are quickly identified based on input and output data of a multi-input single-output nonlinear system, the model precision is ensured while the calculation amount is reduced, the problem that a traditional least square algorithm is unstable due to matrix morbidity is solved, and then the performance of a motion platform is improved through inverse model compensation.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise motion control, and in particular relates to a forward recursive-based hysteresis characteristic modeling method of a small-stroke nanometer motion table. Background technique [0002] The publication number is CN113029235A, the publication date is February 25, 2021, and the invention patent application titled "Small-stroke nanoscale motion table and heat-related hysteresis data measurement method" uses an inchworm motor and a bipolar electromagnet to drive the table in a composite way , can not only give full play to the advantages of large output of the electromagnet, but also take advantage of the high-resolution and high-frequency response output characteristics of the inchworm motor, so that the motion platform can take into account high acceleration and high positioning accuracy. In addition, the motion table can realize rotation around the Z degree of freedom, and can self-lock when p...

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Problems solved by technology

[0006] The object of the present invention is to provide a method for modeling the hysteresis characteristics of a small-stroke nano-movement table based on forward recursion. The present invention is based on the input and output data of a multi-input and single-output nonlinear system to quic

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