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Micro-focus X-ray tube high-frequency vacuum degassing device

A technology of a vacuum degassing device and an X-ray tube, applied in the field of ray tubes, can solve the problems of limited degassing of the X-ray tube, and achieve the effect of improving the degassing effect and the good degassing effect.

Pending Publication Date: 2021-11-12
WUXI UNICOMP TECH
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Problems solved by technology

[0003] The purpose of the present invention is to provide a micro-focus X-ray tube high-frequency vacuum degassing device to solve the problem of limited degassing of X-ray tubes in the prior art

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  • Micro-focus X-ray tube high-frequency vacuum degassing device
  • Micro-focus X-ray tube high-frequency vacuum degassing device

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Embodiment Construction

[0012] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0013] see Figure 1-2 , the present invention provides a technical solution: a micro-focus X-ray tube high-frequency vacuum degassing device, including a high-frequency heating coil 2 and an exhaust tailpipe 3, the shell of the X-ray tube 1 is made of glass or ceramics, and the high-frequency The heating coil 2 is wrapped on the outside of the X-ray tube 1 to heat the X-ray tube 1, one end of the exhaust tail pipe 3 communicates with...

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Abstract

The invention relates to the technical field of X-ray tubes, and particularly relates to a micro-focus X-ray tube high-frequency vacuum degassing device which comprises a high-frequency heating coil and an exhaust tail pipe. The high-frequency heating coil wraps the X-ray tube to heat the X-ray tube, one end of the exhaust tail pipe is communicated with the X-ray tube, and the other end of the exhaust tail pipe is communicated with a vacuum exhaust system. According to the invention, the problem of limited degassing of the X-ray tube in the prior art can be solved.

Description

technical field [0001] The invention relates to the technical field of ray tubes, in particular to a high-frequency vacuum degassing device for micro-focus X-ray tubes. Background technique [0002] Due to the high-voltage insulation requirements of the micro-focus X-ray tube, the cavity of the X-ray tube must maintain an ultra-high vacuum; and the outgassing of parts is a problem that must be solved. The current way of degassing is to bake the entire X-ray tube at high temperature while vacuum pumping, so as to achieve the effect of degassing. However, there are many types of components in the X-ray tube. Because the materials of many parts cannot withstand high temperatures, the degassing of the overall X-ray tube is limited. The vacuum degree of the final X-ray tube is also limited by this and cannot reach a high level. This is why The high voltage limit of the X-ray tube is limited. Contents of the invention [0003] The object of the present invention is to provide ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/39H01J35/16
CPCH01J9/39H01J35/16H01J35/20H01J2235/16
Inventor 张伟仇小军王刘成刘骏
Owner WUXI UNICOMP TECH
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