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Reflection member and evaporation device

A reflective component and evaporation technology, applied in sputtering coating, vacuum evaporation coating, ion implantation coating and other directions, can solve the problem of uneven film thickness, achieve good temperature retention, improve the uneven thickness of evaporation film Effect

Pending Publication Date: 2021-12-10
HEFEI VISIONOX TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present application provides a reflective component and an evaporation device, aiming to solve the problem of uneven film thickness during the evaporation process

Method used

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  • Reflection member and evaporation device
  • Reflection member and evaporation device
  • Reflection member and evaporation device

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Embodiment Construction

[0047] Features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the application. It will be apparent, however, to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application. In the drawings and the following description, at least some well-known structures and techniques have not been shown in order to avoid unnecessarily obscuring the application; and, for clarity, the dimensions of some structures may have been exaggerated. Furthermore, the features, structures, or characteristics described hereinafter may be combined in any suitable manner in one or more embodiments.

[0048]In the ...

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Abstract

The embodiment of the invention provides a reflection member and an evaporation device. The reflection member is used for the evaporation device, the reflection member comprises a bearing plate and two or more temperature adjusting parts, and two or more mounting holes formed in a penetrating mode in the thickness direction of the bearing plate; and the temperature adjusting parts are correspondingly located in the mounting holes, each temperature adjusting part comprises a first branch part and a second branch part, the first branch parts and the second branch parts can move mutually so that the temperature adjusting parts can be switched between a first state and a second state, in the first state, the first branch parts and the second branch parts completely shield the mounting holes, and in the second state, at least part of the mounting holes are not shielded by the first branch parts and the second branch parts. According to the reflection member, when the temperature in the evaporation device exceeds the temperature threshold value, redundant heat can be dissipated, and the problem that the thickness of an evaporation film is not uniform due to abnormal temperature is solved.

Description

technical field [0001] The present application relates to the technical field of evaporation equipment, in particular to an evaporation device and an evaporation system. Background technique [0002] Organic Light-Emitting Diode (OLED) is an active light-emitting device. Compared with the traditional liquid crystal display (Liquid Crystal Display; LCD) display method, the OLED display technology does not need a backlight, and has the characteristic of self-luminescence. OLED uses a thin film of organic material and a glass substrate. When an electric current passes through it, the organic material will emit light. Therefore, OLED display panels can significantly save power, can be made lighter and thinner, can withstand a wider range of temperature changes than LCD display panels, and have a larger viewing angle. OLED display panel is expected to become the next-generation flat panel display technology after LCD, and it is one of the most concerned technologies in flat pan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/543
Inventor 任晶张明王中来王善鹤
Owner HEFEI VISIONOX TECH CO LTD