Statistical calculation method and device for statistical process control, computer device and medium

Abstract

The embodiment of the invention discloses a statistical calculation method and device for statistical process control, a computer device and a medium. In one specific implementation mode, the statistical calculation method comprises the steps of calculating at least one intermediate statistical value of at least one state variable value in at least one process and storing when each process in the at least one process is finished, wherein each process comprises a plurality of processes; sampling each state variable in each process to obtain a plurality of state variable values; and obtaining a demand of a statistical calculation value of statistical process control, and calculating to obtain the statistical calculation value corresponding to the demand according to the at least one intermediate statistical value. According to the embodiment, the statistical calculation efficiency can be greatly improved under the condition of ensuring the statistical calculation precision, so that the statistical query time delay is greatly shortened.

Description

technical field [0001] The invention relates to the field of data statistics. More specifically, it relates to a statistical calculation method and device, computer equipment and media for statistical process control. Background technique [0002] At present, in various production scenarios, in order to detect abnormalities caused by special reasons in the production process in time, monitor the working status of production equipment, deeply analyze the loopholes in the production system, further improve product quality, and provide customers with better products , Statistical Process Control (SPC) will be used in production equipment management for data statistics. Taking the SPC in the cluster management software of the semiconductor production equipment used in the semiconductor production scene as an example, the performance of the SPC is relatively low at present. For example, a single SPC contains 1000 process (Process) logs (log), if the sampling period is 100ms, an...

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Problems solved by technology

For example, a single SPC contains 1000 process (Process) logs (log), if the sampling period is 100ms, and each process lasts 8 hours, it contains 288000 state variable values ​​for a certain state variable (such as operating temperature) , even if the log of multiple processes is inquired and calculated in parallel during the statistical calculation, it takes about 1.5 hours to draw the log of the SPC

Among them, in the existing technology, all state variable values ​​of all types are stored in a table to facilitate writing operations. Each state variable forms a small table, and the variable values ​​are stored in chronological order inside the table. In order to save storage space, the data 7 days ago will be compressed. Data, when performing statistical calculations or aggregation calculations, these historical data need to be loaded and decompressed first, and the amount of data is huge, which increases the delay of querying data

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