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An automatic measurement device and method for heterogeneous transition surface topography

A technology for automatic measurement and surface topography, applied in measurement devices, optical devices, instruments, etc., can solve the problems of missing distance data, abnormality, large difference in light intensity, etc., to achieve overall volume and weight satisfaction, small component volume, The effect of improving reliability

Active Publication Date: 2022-03-04
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the technical problem that the distance data is missing or abnormal due to the large difference in light intensity caused by the difference in the light absorption characteristics of the material during the shape measurement process of the heterogeneous transition surface. Automatic measurement method and method of homogeneous transition surface topography

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  • An automatic measurement device and method for heterogeneous transition surface topography
  • An automatic measurement device and method for heterogeneous transition surface topography
  • An automatic measurement device and method for heterogeneous transition surface topography

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Embodiment 1

[0044] Such as figure 1 As shown, the present embodiment provides a method for automatic measurement of heterogeneous transition surface topography, including a spectrometer 1, a light source 2, an optical fiber coupler 3, a dispersion system 4, a sample to be tested 5, a moving rail 6, and a rail controller 7 , computer 8 and microcontroller 9; spectrometer 1 and light source 2 cooperate with dispersion system 4 through fiber coupler 3;

[0045] The motion guide rail 6 is a two-dimensional motion guide rail, the sample to be tested 5 is fixed on the two-dimensional motion guide rail, and the guide rail controller 7 controls the two-dimensional motion guide rail to drive the sample to be measured 5 to move in a plane; the dispersion system The optical axis direction of 4 is perpendicular to the two-dimensional plane of the two-dimensional motion guide rail, and the two-dimensional motion guide rail drives the sample 5 to be measured to move in the two-dimensional plane to real...

Embodiment 2

[0053] Such as figure 2 As shown, a method for automatic measurement of heterogeneous transition surface topography includes the following steps:

[0054] Step 1. The automatic measuring device is assembled, and the position of the dispersion system 4 is adjusted so that the sample to be measured 5 is within the range of the dispersion system 4. During the movement of the two-dimensional moving guide rail, the spectrometer 1 scans the reflected light intensity on the surface of the sample to be measured 5, The light intensity information reflected by the surface of the sample 5 to be tested is obtained, and the guide rail controller 7 and the microcontroller 9 establish a one-way trigger connection during the scanning process, so as to realize the synchronization of the position information of the two-dimensional moving guide rail during the movement process;

[0055] Step 2, the microcontroller 9 analyzes the light intensity information obtained by scanning, and plans the sc...

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Abstract

The invention discloses an automatic measurement device and method for heterogeneous transition surface topography, which relates to the technical field of topography measurement. The measurement device makes the wavelength and axis of monochromatic light satisfying confocal conditions by establishing a spectral axial color difference system. Mapping to the distance is formed, and the surface distance measurement can be realized by analyzing the monochromatic light wavelength measured by the spectrometer. Measure the surface of the sample, and then realize the surface topography measurement; the measurement method plans the scanning trajectory of the guide rail, collects the light intensity information before collecting the distance data, and dynamically adjusts the parameters of the spectrometer accordingly; the invention effectively solves the problem of During the shape measurement process of the homogeneous transition surface, the difference in light intensity due to the difference in light absorption characteristics of the material leads to a large difference in light intensity, which in turn leads to technical problems such as missing or abnormal distance data, and realizes the automatic measurement of the heterogeneous transition surface topography.

Description

technical field [0001] The present invention relates to the technical field of shape measurement, and more specifically relates to the automatic measurement method and method technical field of heterogeneous transition surface topography. Background technique [0002] High-precision microscopic shape measurement depends on the measurement of high-precision displacement. At present, among the many displacement measurement methods, the photoelectric displacement measurement technology has obvious advantages. The main methods include white light interference, laser confocal, atomic force microscope and spectral axial chromatic aberration. Among them, the measurement accuracy of the white light interferometric displacement measurement method can reach the sub-nanometer level, but the environmental adaptability is poor, and it is not suitable for the jump structure detection; the laser confocal displacement measurement method can reach the nanometer level, but the measurement hea...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 刘丽佳石振东马骅张霖白金玺马可杨一柴立群任寰
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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