Offset error determination method and device, computer readable storage medium and terminal equipment

Abstract

The invention relates to an offset error determination method and device, a computer readable storage medium, and terminal equipment, the offset error determination method comprises: acquiring a to-be-simulated layout, and setting a simulation frame based on the shape and size of a target geometric figure in the layout, the size of the simulation frame in the width direction of the target geometric figure being greater than the width of the target geometric figure; moving the simulation frame from the starting position according to a preset route, the starting position being a coincidence point of the center point of the target geometric figure and the center point of the simulation frame, the preset route being located in the target geometric figure, an included angle being formed between at least one part of route in the preset route and the horizontal direction, and the included angle being larger than a preset angle and smaller than 90 degrees; calculating a feature size corresponding to the moved simulation frame based on each movement operation; and determining the offset error of the layout according to a plurality of feature sizes calculated by multiple moving operations. According to the invention, the efficiency of calculating the offset error during optical proximity correction can be improved.

Description

technical field [0001] The present invention relates to the field of computer technology, in particular to a method and device for determining an offset error, a computer-readable storage medium, and a terminal device. Background technique [0002] In the calculation process of Optical Proximity Correction (OPC), the sampling of the signal is discrete, and the signal between sampling points needs to be obtained by interpolation algorithm, so the signal value of the polygon edge (polygon edge) is mostly is the result of the interpolation calculation. The variation range of the critical dimension (CD) at each sampling point is called shift variance. The offset error is one of the important indicators to judge the stability of the model and the consistency of the OPC results. [0003] For a single polygon, the existing technique is to sample the array positions and calculate the key dimensions at multiple array positions, thereby obtaining the offset error. [0004] However,...

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Problems solved by technology

[0004] However, in order to calculate the key dimension, a large number of calculations are required. When the number of polygons to be tested is large, the calculation time will become very long and the calculation efficiency will be low.

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