Film thickness control device and rapid film coating method thereof
A control device and film thickness technology, which is applied in sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problems of poor practicability, inconsistency of film color, and inability to control film thickness well, achieving Good film color, consistent film color, and improved stability
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[0036] Next, the technical solutions in the embodiments of the present invention will be described in connection with the drawings of the embodiments of the present invention, and it is understood that the described embodiments are merely the embodiments of the present invention, not all of the embodiments.
[0037] In the description of the invention, unless otherwise stated, the meaning of "multiple" is two or more; the term "upper", "lower", "left", "right", "within", "outside" , "Front end", "backend", "head", "tail", etc. The orientation is based on the orientation or positional relationship shown in the drawings, which is only for ease of describing the invention and simplified description, not An indication or implies that the device or element must have a specific orientation, constructed and operated in a particular orientation, and thus is not to be construed as limiting the invention. Moreover, the terms "first", "second", "third", etc. are only used to describe purpose...
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