Atomic layer deposition equipment
An atomic layer deposition and equipment technology, applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve problems affecting the uniformity of film thickness, poor pollutant evacuation effect, and poor film thickness uniformity, etc. To achieve the effect of good emptying effect, good uniformity and improved efficiency
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[0029] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
[0030] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms, "upper", "lower", "front", "inner", etc. is based on the orientation or positional relationship shown in the accompanying drawings, only It is for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientati...
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