Chemical conveying system and method for eliminating static electricity of chemical conveying pipeline
A technology for conveying systems and pipelines, applied in the direction of static electricity, circuits, electrical components, etc., can solve problems such as fire or explosion
Pending Publication Date: 2022-03-04
CHANGXIN MEMORY TECH INC
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[0004] Based on this, it is necessary to provide a chemical delivery system and a method for eliminating static electricity in the chemical delivery pipeline for the problem that static electricity encountering high-concentration isopropanol may cause fire or explosion hazards in the chemical reagent delivery pipeline
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[0030] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "...
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The invention relates to a chemical conveying system and a method for eliminating static electricity of a chemical conveying pipeline. The chemical conveying system comprises a chemical reagent conveying pipe, a liquid storage device and an aerosol generating device. And the liquid storage device is used for storing an aerosol generating solution. The input end and the output end of the aerosol generating device are respectively communicated with the liquid storage device and the chemical reagent conveying pipe. And the aerosol generating solution in the liquid storage device enters the aerosol generating device. And the aerosol generating device converts the aerosol generating solution from a liquid state to an aerosol state. The aerosol enters the chemical reagent conveying pipe to be diffused and adsorbs and eliminates ions with charges in the chemical reagent conveying pipe, and therefore the situation that electrostatic ions encounter flammable and explosive chemical reagents to cause fire disasters or explosions can be avoided.
Description
technical field [0001] The present application relates to the technical field of semiconductor equipment, in particular to a chemical delivery system and a method for eliminating static electricity in chemical delivery pipelines. Background technique [0002] In the manufacturing process of semiconductor devices, wafers are essential basic components. In order to improve production efficiency, it is usually necessary to quickly dry the wafer after wafer cleaning. High-concentration isopropanol, due to its high volatility, can improve the drying efficiency of wafers after wafer cleaning. [0003] However, high-concentration isopropanol is highly corrosive. Using stainless steel pipes to transmit high-concentration isopropanol is likely to cause corrosion to stainless steel pipes and increase the risk of pipeline leakage. Therefore, most manufacturers will choose chemical reagent delivery pipelines made of super tensile and temperature resistant polyvinylidene fluoride (PVDF...
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IPC IPC(8): H05F3/00H01L21/67
CPCH05F3/00H01L21/67034H01L21/67H01L21/67017
Inventor 邱垂翰王青秦红星张玉安建路
Owner CHANGXIN MEMORY TECH INC