A high-efficiency loading structure suitable for stacked wafers

Abstract

The invention relates to the technical field of wafer loading, in particular to a high-efficiency loading structure suitable for stacked wafers. It includes a transmission component and a storage component installed on one side of the transmission component. The transmission component includes an operation table, an L-shaped plate is arranged on the side of the operation table, and a limited hole is opened on the top of the L-shaped plate. The storage component includes a bracket. The storage bin is provided with a limit bar on the side of the storage bin. In the present invention, the transfer device stacks the wafers at the inner end of the storage bin. With the continuous stacking of wafers, the gravity of the storage bin gradually increases. The gravity of the storage bin is greater than the elastic force generated by each return spring, and the return spring shrinks. After the full wafer is stored, the limit rod is completely disengaged from the inner end of the limit hole, the third servo motor drives the bracket to rotate, drives the storage bin full of wafers to move out of the storage position, and drives the other storage bin to the storage position to realize The automatic replacement function of the storage bin improves the feeding efficiency.

Description

technical field [0001] The present invention relates to the technical field of wafer feeding, in particular to an efficient feeding structure suitable for stacking wafers. Background technique [0002] The standard material box of the fully automatic probe station equipment is a layered design of 18 layers. Each material box can only hold 18 wafers. The number of wafers is small. The operator needs to replace the material box frequently. The stacked material boxes can increase the number of wafers placed in each material box and reduce the labor intensity of operators. round, improve equipment efficiency, and at the same time, the existing fully automatic probe station equipment requires the operator to replace the full wafer cassette in time, and the automatic performance is poor. The staff has a lot of energy. SUMMARY OF THE INVENTION [0003] The purpose of the present invention is to provide a high-efficiency feeding structure suitable for stacking wafers, so as to s...

AI Technical Summary

Problems solved by technology

[0002] The standard material box of the automatic probe station equipment is an 18-layer layered design, and each material box can only hold 18 wafers. The number of wafers is small, and the operator needs to change the material box frequently. Stacked magazines can increase the number of wafers placed in each magazine and reduce the labor intensity of operators. The efficient loading structure of stacked wafers in the present invention can realize automatic probe station equipment to obtain stacked wafers. Round, improve equipment efficiency, at the same time, the existing automatic probe station equipment requires operators to replace the magazines full of wafers in time, the automatic performance is poor, and operators need to pay attention to the status of wafers stored in the magazines at all times, which is labor-intensive staff a lot of energy

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