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Micromechanical sensor element

A technology of micro-mechanical sensors and components, applied in electrical components, piezoelectric devices/electrostrictive devices, instruments, etc., can solve problems such as unstable design

Pending Publication Date: 2022-05-10
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Furthermore, the closer the anchors are moved to each other, the smaller and therefore also the less stable the anchors have to be constructed

Method used

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  • Micromechanical sensor element
  • Micromechanical sensor element
  • Micromechanical sensor element

Examples

Experimental program
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Embodiment Construction

[0032] figure 1 The micromechanical sensor element 1 is shown in a schematic plan view. The micromechanical sensor element 1 is designed to detect an acceleration occurring at least along a first direction 2 and optionally additionally along a second direction 3 extending perpendicular to the first direction 2 . In this case, the micromechanical sensor element 1 can also be referred to as an XY acceleration sensor 1 .

[0033] The micromechanical sensor element 1 has a substrate which is in figure 1 not shown in The plane spanned by the two directions 2 , 3 corresponds to the main plane of extent of the substrate. exist figure 1 The elements shown in are arranged on and / or over a substrate and can be manufactured by semiconductor manufacturing techniques. exist figure 1 The elements shown in can have, for example, silicon.

[0034] The micromechanical sensor element 1 comprises a first structure 5 arranged movably on the substrate and a second structure 6 arranged movab...

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Abstract

The invention relates to a micromechanical sensor element (1, 1 '), comprising a substrate, a first structure (5) which is movably arranged on the substrate, a second structure (6) which is movably arranged on the substrate, and an electrode arrangement (15) which is fixedly arranged on the substrate and which has at least one first electrode (31). The movably arranged structures (5, 6) are coupled to each other by means of at least one coupling element (9) in such a way that the second movably arranged structure experiences an offset in the opposite direction when the first movably arranged structure is offset in the first direction (2). The first electrode has a plurality of electrode surfaces (19). The movably arranged structures each have a plurality of movable electrode surfaces (20, 30). The electrode surface fixed to the substrate and the movable electrode surface are joined to each other. The movable electrode surfaces are each arranged on a side (35) of the electrode surface of the electrode arrangement fixed to the substrate facing away from the movably arranged structure.

Description

technical field [0001] The invention relates to a micromechanical sensor element. Background technique [0002] Microelectromechanical systems (MEMS) are known from the prior art, by means of which the movement of an oscillating mass can be detected. Such a MEMS can be designed, for example, as an acceleration sensor or as a rotational speed sensor. Typically, at least one seismic mass is freely movably suspended from the substrate via springs. The movable electrodes are constructed on the vibrating mass. An anchored electrode is formed on the substrate, which forms a capacitance with the movable electrode of the seismic mass. The position of the movable mass perpendicular to the electrode surface can be determined by measuring the capacitance. Typically, two oppositely operating, symmetrical pairs of electrodes are arranged opposite the movable mass. From the resulting differential signal of the capacitance, the change in position or the absolute position of the seismi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00G01P3/44G01P15/125
CPCB81B3/0021B81B3/0067G01P15/125G01P3/44B81B2201/0235B81B3/0086B81B2201/025B81B2203/0307B81B2203/0136G01P2015/0862B81B3/0027B81B2203/04
Inventor J·赖因穆特
Owner ROBERT BOSCH GMBH