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Capacitance film vacuum gauge

A vacuum gauge and thin-film technology, which is applied in the semiconductor field, can solve the problems of uneven deformation of the first sensing diaphragm and affect the accuracy and sensitivity of capacitive thin-film vacuum gauges, and achieve the effect of ensuring accuracy and sensitivity

Active Publication Date: 2022-05-10
JIHUA LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of this application is to provide a capacitive thin film vacuum gauge, which aims to solve the problem that the uneven deformation of the first sensing diaphragm affects the accuracy and sensitivity of the capacitive thin film vacuum gauge

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of them. The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present application.

[0031] It should ...

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Abstract

The invention relates to the field of semiconductors, in particular to a capacitive thin film vacuum gauge, which comprises a shell, a thin film electrode, a first electrode, a second electrode, a third electrode and a fourth electrode, the elastic membrane divides the accommodating cavity into a measuring chamber and a reference cavity; the connecting port is communicated with the measuring chamber; the fixed substrate is arranged in the reference cavity, the fixed substrate is parallel to the elastic membrane, and a fixed electrode is arranged on one side, close to the elastic membrane, of the fixed substrate; the sensing diaphragm is arranged between the fixed electrode and the elastic diaphragm in parallel, and is connected with the elastic diaphragm through a bracket; the support can drive the sensing diaphragm to move close to or away from the fixed electrode when the elastic diaphragm deforms. Therefore, the accuracy and the sensitivity of the capacitance film vacuum gauge are effectively improved.

Description

technical field [0001] The present application relates to the field of semiconductors, in particular to a capacitive thin-film vacuum gauge. Background technique [0002] In the prior art, the general structure of capacitive thin film vacuum gauge is as follows figure 2 As shown, it includes a first shell 201; a substrate 202; a first lead-out electrode 203; an outer ring fixed electrode 204; an inner ring fixed electrode 205; a first induction diaphragm 206; 209; air suction mechanism 210; air suction port 211 and thin film vacuum gauge signal conversion circuit (not shown in the figure). Its working principle: when the inlet pipe 207 is connected with the object to be measured, the vacuum degree of the vacuum chamber 208 to be measured is the same as that of the object to be measured. The first sensing diaphragm 206 is deformed, therefore, the distance between the first sensing diaphragm 206 and the outer ring fixed electrode 204 and the inner ring fixed electrode 205 ch...

Claims

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Application Information

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IPC IPC(8): G01L21/00G01L19/00G01L19/14
CPCG01L21/00G01L19/00G01L19/14
Inventor 黄星星侯少毅卫红刘乔胡强
Owner JIHUA LAB