Semiconductor manufacturing scheduling method and system and computer readable storage medium

Abstract

The invention discloses a semiconductor manufacturing scheduling method and system and a computer readable storage medium. The method comprises the following steps: determining a mathematical optimization model according to a data scale; generating a first scheduling sequence according to the mathematical optimization model, and performing iterative calculation on the first scheduling sequence through the mathematical optimization model under a constraint condition to obtain a second scheduling sequence; determining an optimal strategy based on an operation result of each training action, determining a target total strategy according to the optimal strategy corresponding to each state parameter, and performing simulation scheduling according to the target total strategy to obtain a third scheduling sequence; and performing scheduling operation according to the third scheduling sequence. According to the method, rapid target optimization of semiconductor manufacturing scheduling is realized, the production capacity is effectively and reasonably distributed, the resource utilization rate is improved, and the production cost is reduced.

Description

technical field [0001] The present invention relates to the technical field of semiconductor manufacturing, in particular to a semiconductor manufacturing scheduling method, system and computer-readable storage medium. Background technique [0002] Semiconductor manufacturing is one of the complex industrial manufacturing chains, which usually includes four production stages: wafer fabrication, wafer sorting, packaging and product testing. Among them, wafer fabrication is a complex work, with hundreds of process steps required for the manufacture of machines and silicon wafers. A small part of the products exist in hundreds of processes in the factory, therefore, it is necessary to create complex capacity allocation and job scheduling problems, that is, scheduling problems are closely concerned issues in semiconductor manufacturing. Scheduling problem generally means that n workpieces are processed in a pipeline on m machines. Each workpiece takes different time to run on e...

AI Technical Summary

Problems solved by technology

[0003] At present, there is an existing semiconductor production scheduling method that uses evolutionary laws to construct intelligent optimization algorithms such as genetic algorithms for querying, but this method needs to construct sequence populations and perform optimization iterations in the populations, and requires Each individual is calculated separately. When the population is larger, the amount of calculation is also greater, resulting in a large amount of time for a solution.

Images