Combined measuring instrument, calibration device and evaporation system
A technology combining a measuring instrument and a calibration device, applied in the field of evaporation, can solve problems such as low calibration efficiency, and achieve the effect of improving calibration efficiency
Pending Publication Date: 2022-05-13
HEFEI VISIONOX TECH CO LTD
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Problems solved by technology
Therefore, it is usually necessary to calibrate the position of the evaporation source cover before evaporation; however, when the existing calibration device is used to calibrate the position of the evaporation source cover, the calibration efficiency is low
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[0045] As mentioned in the background technology, the existing calibration device has the problem of low calibration efficiency. The inventors have found that the reason for this problem is that the existing evaporation The source is arranged on the carrying table, the carrying backboard is arranged above the evaporation source, and the carrying backboard is used for installing the substrate to be evaporated. During evaporation, the evaporation material is placed in the evaporation source to be heated and evaporated, and the gas molecules of the formed evaporation material are deposited on the substrate to be evaporated to form a film layer.
[0046] In order to ensure the uniformity of film formation, it is necessary to calibrate the position of the evaporation source cover relative to the center of the bottom wall of the evaporation chamber, and the height between the evaporation source cover and the substrate to be evaporated. The existing calibration device includes a scal...
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The invention provides a combined measuring instrument, a calibration device and an evaporation system, relates to the technical field of evaporation, and is used for solving the technical problem that an existing calibration device is low in calibration efficiency. The combined measuring instrument comprises a horizontal rod, a probe and a fixed rod; the fixing rod is arranged in the vertical direction, one end of the fixing rod is inserted into a center hole in the bottom wall of the evaporation chamber, the other end of the fixing rod is connected with the horizontal rod, and the horizontal rod can rotate horizontally; one end of the probe is connected to the horizontal rod, the position of the probe is adjustable in the horizontal direction and the vertical direction relative to the horizontal rod, and the horizontal distance between the fixing rod and the probe is set as the preset horizontal distance between the center of the evaporation source cover and the center hole during evaporation; the bottom end of the probe is used for making contact with the top face of the evaporation source cover, and the height of the bottom end of the probe relative to the bottom wall of the evaporation cavity is set to be the height corresponding to the preset height between the evaporation source cover and the substrate to be evaporated during evaporation. The combined measuring instrument provided by the invention is used for quickly calibrating the evaporation source cover.
Description
technical field [0001] The present application relates to the field of vapor deposition technology, in particular to a combined measuring instrument, calibration device and vapor deposition system. Background technique [0002] In the manufacturing process of display devices, the evaporation coating process is usually used to form a film layer on the substrate to be evaporated; the principle of the evaporation coating process is to place the evaporation material in the evaporation source of the evaporation device to heat and evaporate, and the formed evaporation material The gas molecules are deposited on the substrate to be evaporated to form a film layer. [0003] In order to ensure the evaporation effect, such as the uniformity of film formation; the evaporation source cover is set on the evaporation source during evaporation. For the horizontal distance between the evaporation source cover and the center of the bottom wall of the evaporation chamber, the evaporation sour...
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Login to View More IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/546
Inventor 侯佳森刘全宝赵姗
Owner HEFEI VISIONOX TECH CO LTD