Method for detecting air tightness of single crystal furnace

Abstract

The invention discloses a method for detecting the airtightness of a single crystal furnace. The method comprises the following steps: closing an air inlet valve and an air outlet valve of the single crystal furnace; vacuumizing the single crystal furnace for T1, and then detecting the actual pressure in the single crystal furnace; comparing the actual pressure intensity variable quantity in the single crystal furnace with the standard pressure intensity variable quantity, if the actual pressure intensity variable quantity in the single crystal furnace is greater than or equal to the standard pressure intensity variable quantity, keeping the single crystal furnace closed and lasting for T2, and then detecting the actual pressure intensity in the single crystal furnace again; comparing and judging whether the actual pressure in the single crystal furnace is increased or not, if not, judging that the single crystal furnace is good in air tightness, and if yes, judging that the single crystal furnace is poor in air tightness; therefore, the detection method adopted by the invention can accurately judge whether the airtightness of the single crystal furnace is good or not, so that a thermal field is protected, the quality of drawn single crystals is ensured, the qualified rate of products is ensured, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of photovoltaic product preparation, in particular to a method for detecting the airtightness of a single crystal furnace. Background technique [0002] The single crystal furnace is the main equipment for preparing single crystal ingots, and the poor air tightness of the single crystal furnace will seriously affect the crystallization of the single crystal ingots. If the airtightness of the single crystal furnace is poor, during the single crystal pulling process, air will enter the single crystal furnace, and the air entering the single crystal furnace will react with the thermal field at high temperature, thereby damaging the thermal field, resulting in production costs In addition, oxygen in the air will participate in the single crystal pulling process, resulting in a high oxygen content in the single crystal, which will induce micro-defects in the single crystal, affect the quality of the single crysta...

AI Technical Summary

Problems solved by technology

The current method in the industry to check the air tightness of the single crystal furnace is to evacuate the single crystal furnace to the limit. If the single crystal furnace can be pumped to the limit pressure during this period, that is, the pressure in the single crystal furnace can be low enough, then It is determined that the airtightness of the single crystal furnace is good; if the pressure in the single crystal furnace cannot reach a low enough level within this time, it is determined that the airtightness of the single crystal furnace is poor

[0004] With this detection method, the single crystal furnace with serious air leakage can be detected by this method. However, in the case of a weak air leakage, if the single crystal furnace is vacuumed for a long enough time, The pressure of the single crystal furnace is pumped down enough, that is to say, the current traditional detection method cannot accurately judge the airtight performance of the single crystal furnace.

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