3D shape obtaining method and device applied to object surface defect detection
A defect detection and acquisition method technology, which is applied in the direction of measuring devices, optical devices, and optical testing of defects/defects, can solve problems such as low efficiency, high missed detection rate, and high cost, and achieve high detection accuracy, avoid loss, and reliability good sex effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0019] A kind of 3D topography acquisition device that this example involves, such as figure 1 As shown, the non-coaxial light source 3D profile acquisition device includes a rotating platform 1, a rotating adjustable bracket 2, a line-scanning camera 3, a line-scanning light source 4, a stage 6, and a storage and computing unit 7; Connect the rotating adjustable bracket 2, and the rotating platform 1 can make the rotating adjustable bracket 2 achieve a horizontal rotation of 0-360° under the drive of the electric rotating table inside; the line scan camera 3 and the light source are installed on the rotating adjustable bracket 2 At both ends, when the relative positions of the line scan camera 3 and the line light source remain unchanged, the whole can rotate with the rotating adjustable bracket, and the angle of rotation is consistent with the angle of the electric rotary table inside the rotating platform; at the same time, the line scan camera 3 and the The line light sour...
Embodiment 2
[0030] Another 3D topography acquisition device involved in this example, such as figure 2 As shown, the coaxial light source 3D profile acquisition device includes a line-scan camera, a coaxial light source, a stage, and a storage and computing unit.
[0031] Wherein, below the line scan camera 3 is a coaxial parallel light source, below the coaxial light source 8 is the stage 6, and the upper surface of the stage 6 carries the object to be measured 5; the CD side of the upper surface of the stage 6 can be Under the action of the servo screw lifting device inside the stage 6, the height of this side relative to the bottom surface can be adjusted accurately, so as to realize the inclination of the upper surface relative to the bottom surface at a certain angle, so as to take pictures of the object under test at different angles; the object under test is fixed On the stage 6, the stage 6 can reciprocate along the direction (parallel to the AC side) of the vertical line-scannin...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


