Magnetic sensing unit array and method for measuring planar two-dimensional magnetic field direction
A technology of sensing unit and sensitive direction, applied in the field of magnetic sensitive sensors, can solve problems such as poor accuracy and insufficient device robustness, and achieve the effects of improving robustness, reducing the influence of errors, and improving measurement accuracy
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Embodiment 1
[0029] see figure 1 and figure 2 As shown in the figure, the present invention is a magnetic sensing unit array, and the magnetic sensing unit array includes three or more magnetic field sensitive directions (denoted as e 0 ) of the magnetic sensitive sensing units 1, each of the magnetic sensitive sensing units 1 is uniformly arranged along the circumferential direction, and the magnetic field sensitive direction e of each of the magnetic sensitive sensing units 1 0 are arranged in the radial direction.
[0030] Please refer to figure 2 As shown, the magnetic sensitive sensing unit 1 used in the present invention, when the external magnetic field H and the magnetic field sensitive direction e 0 When the angle between them changes, according to the giant magnetoresistance effect or tunneling magnetoresistance effect, in the linear response region, the magnetoresistance R(θ) of the magneto-sensitive sensing unit 1 can be approximated as a period of 2π. cosine function.
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Embodiment approach
[0034] As a specific embodiment of the present invention, the magnetic field sensitive direction e of each of the magnetic sensitive sensing units 1 0 All are arranged radially toward the inside of the circumference.
[0035] As another specific embodiment of the present invention, the magnetic field sensitive direction e of each of the magnetic sensitive sensing units 1 0 Both are arranged radially toward the outside of the circumference.
[0036] In some embodiments of the present invention, the magneto-sensitive sensing unit 1 adopts a magneto-sensitive sensor unit with a period of 2π, specifically a magneto-sensitive sensor unit with a period of 2π in the direction of the magnetic field in a given plane. is the plane where the array of magneto-sensitive sensing units is located; for example, any one of giant magnetoresistance devices and tunneling magnetoresistive devices is used as the magneto-sensitive sensing unit 1 in the array of magneto-sensitive sensing units 1. I...
Embodiment 2
[0039] Please refer to Figure 1 to Figure 4 As shown in the figure, the present invention is a method for measuring the plane two-dimensional magnetic field direction based on a magnetic sensitive sensing unit array, wherein the specific structure of the magnetic sensitive sensing unit array please refer to the detailed introduction of the first embodiment, and will not be described here. repeat;
[0040] The method includes:
[0041] Set the reference direction of the external magnetic field of the magnetic sensitive sensing unit array, and measure the magnetoresistance of each magnetic sensitive sensing unit 1 in the magnetic sensitive sensing unit array under the reference direction of the external magnetic field, and measure the magnetic resistance of each magnetic sensitive sensing unit measured. The magnetoresistance R(θ) of unit 1 is fitted to obtain the first cosine function curve with a period of 2π Among them, θ represents the angle between each magnetic sensing ...
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