Probe structure for high-frequency test

A probe and high-frequency technology, which is applied in the field of probe structure for high-frequency testing, can solve problems such as inconsistency and unstable test data, and achieve the effects of eliminating fatigue problems, eliminating small rotation offsets, and improving stability

Pending Publication Date: 2022-07-12
STELIGHT INSTR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Based on the above findings, the object of the present invention is to provide a probe structure for high-frequency testing, which solves the problem of unstable and inconsistent test data during long-term use due to the fatigue of the probe station. question

Method used

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  • Probe structure for high-frequency test
  • Probe structure for high-frequency test
  • Probe structure for high-frequency test

Examples

Experimental program
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Effect test

Embodiment 1

[0023] Embodiment 1: A probe structure for high-frequency testing, comprising a main body 1, a support plate 2 located below the main body 1, a probe 51 for contacting a chip to be tested, and a moving point contact probe 31, the probe 51 2. The moving point contact probes 31 are respectively installed on both ends of the support plate 2, the middle part of the support plate 2 and the main body 1 are connected by a vertically arranged second elastic member 23, and one side of the lower end surface of the main body 1 is provided with a the static point contact probe 32 above the moving point contact probe 31 and corresponding to the moving point contact probe 31;

[0024] A first pin 9 perpendicular to the length direction of the support plate 2 is mounted on the upper part of the support plate 2 between the probe 51 and the second elastic member 23 through an adapter seat 6 , and is located on the other side of the lower end surface of the main body 1 . A second pin 11 and a t...

Embodiment 2

[0027]Embodiment 2: A probe structure for high-frequency testing, comprising a main body 1, a support plate 2 located below the main body 1, a probe 51 for contacting a chip to be tested, and a moving point contact probe 31, the probe 51 2. The moving point contact probes 31 are respectively installed on both ends of the support plate 2, the middle part of the support plate 2 and the main body 1 are connected by a vertically arranged second elastic member 23, and one side of the lower end surface of the main body 1 is provided with a The static point contact probe 32 above the moving point contact probe 31 and corresponding to the moving point contact probe 31, when the probe is in contact with the chip to be tested, the moving point contact probe rotates away from the static point contact probe with the support plate, and the dynamic and static point contact The probes change from the initial state of mutual contact to the state of mutual separation. After the control system o...

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Abstract

The invention discloses a probe structure for high-frequency testing, which comprises a body, a support plate positioned below the body, a probe used for contacting with a to-be-tested chip and a movable point contact probe, and is characterized in that when the probe contacts with the to-be-tested chip, the movable point contact probe rotates along with the support plate to be far away from a static point contact probe; the movable point contact probe and the static point contact probe are changed into a mutually separated state from an initial state of mutual contact, the middle of the supporting plate is connected with the body through a vertically arranged second elastic piece, and a first pin shaft perpendicular to the length direction of the supporting plate is installed in an area, located between the probe and the second elastic piece, above the supporting plate through an adapter. The lower end of a first elastic piece in a stretching state is connected with the first pin shaft, and the upper end of the first elastic piece is connected with a fourth pin shaft which is located in the body and located above the second pin shaft and the third pin shaft. According to the invention, the problem that the test data is unstable and inconsistent in the long-term use process due to the fatigue of the probe station is solved.

Description

technical field [0001] The invention relates to a probe structure for high-frequency testing, belonging to the technical field of chip testing. Background technique [0002] In the testing process of a single laser chip (LD) for optical communication, the stability of the probe plays a very important role. Since the size of a single chip is very small (generally in the range of 300 μm), the test probe may be in contact with the chip during the process of contacting the chip. At least it will push the position or angle of the chip to shift. Once the position and angle of the chip change, it will directly affect the stability and test efficiency of the subsequent test indicators, and the pressure stability of the test probe will also be directly fed back. In terms of the stability of the test value, for the mass production testing process, a probe needs to detect a large number of chips, and the same chip needs to be tested multiple times. The stability and durability of the p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/067G01R31/26
CPCG01R1/06711G01R31/2601
Inventor 黄建军吴永红赵山胡海洋
Owner STELIGHT INSTR CO LTD
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