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Integrated optical interferometed based on interlinking technology

An integrated optics and interferometer technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems of complex alignment, small signal, large coupling loss, etc., and achieve the effect of solving difficult alignment and simple structure

Inactive Publication Date: 2005-03-23
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

This integrated structure only uses waveguide technology and optical feedback technology to miniaturize the traditional two-arm interferometer, so more components are required, resulting in complex alignment between various components
In addition, in terms of performance, due to the large coupling loss between the waveguide and the external target, the signal is very small, and the value is on the order of nanoamps (nA)

Method used

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  • Integrated optical interferometed based on interlinking technology
  • Integrated optical interferometed based on interlinking technology

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Embodiment Construction

[0008] Such as figure 1 As shown, the present invention mainly comprises: micro-optical lens 1, isolator 2, ultra-thin film photodiode 3, and its connection mode is: micro-optic lens 1 is on the uppermost layer, isolator 2 is in the middle, and the lower layer is ultra-thin film photodiode 3. These three layers are connected by bonding. The micro-optical lens 1, the isolator 2, and the ultra-thin film photodiode 3 are respectively in the form of an array, and then connected by bonding technology.

[0009] The ultra-thin film photodiode 3 adopts a lateral PN junction structure, and the p-n junction of the photodiode is integrated along the horizontal axis on the silicon chip.

[0010] The thickness of the active layer in the ultra-thin film photodiode 3 satisfies mλ / 4n, where m=1, 3, 5..., λ is the wavelength of light, and n is a natural number.

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Abstract

An interferometer is mainly composed of microoptic lens, isolator and superthin film diode. They are connected as setting the microoptic lens at top layer, the isdator at middle layer and the superthin film diode at bottom layer, of which three layer are connected to each other through linkage connection. The measurement range of the present invention can achieve the coherence length of laser.

Description

technical field [0001] The invention relates to an optical interferometer, in particular to an integrated optical interferometer based on bonding technology, which belongs to the field of microfabrication. Background technique [0002] In recent years, with the rapid development of MEMS technology, various optical devices are gradually developing towards miniaturization and integration. An optical interferometer is an interferometric instrument used to measure the displacement and deformation of an optical surface. It uses laser as the information carrier of the surface to be measured, and displays the contour fringes of the displacement or deformation of the specimen surface on the TV monitor in the form of interference fringes, which can be used for high-sensitivity displacement sensors, shape determination, and refractive index determination , in-plane displacement, vibration analysis and non-destructive testing of materials or components. Since the traditional optical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02H01L31/0248
Inventor 李以贵宋康陈水良宓晓宇
Owner SHANGHAI JIAOTONG UNIV