Substrate processing devices

Abstract

The present invention relates to a substrate processing device, the device can prevent the reverse surface of a substrate from being stained due to local corrosion when the substrate which corrodes with liquid chemicals such as an etchant and peeling liquid is used. A dip tank (37) is provided at the entrance part of a liquid chemical processing part. The dip tank (37) is arranged below a conveyance line for the substrate (100), and the liquid chemicals are made to overflow to be brought into contact with the reverse surface of the substrate (100) to the overall width. When the reverse surface of the substrate (100) becomes temporarily and uniformly wet due to its coming into contact with the liquid chemicals, the substrate is not stained on condition that the reverse surface does not become dry even if the liquid chemicals stick locally on the reverse surface of the substrate (100) as long as the liquid chemicals flow around or a conveyance roller comes into contact.

Description

technical field [0001] The present invention relates to a substrate processing apparatus of a horizontal transfer type used in the manufacture of glass substrates of liquid crystal display devices and the like. Background technique [0002] A glass substrate used for a liquid crystal display device is manufactured by repeatedly performing chemical treatments such as etching and peeling on the surface of a glass substrate as a material. The processing device is roughly divided into dry type and wet type, and wet type is further divided into batch type and blade type. Furthermore, the blade type is subdivided into transmission types such as rotary type and roller transmission. [0003] Among these substrate processing apparatuses, transfer type apparatuses have a basic structure of conveying a substrate approximately horizontally while supplying a processing liquid to the surface of the substrate, and have been conventionally used for etching processing and peeling processing...

AI Technical Summary

Problems solved by technology

[0008] However, even with such backside spraying, stains caused by local corrosion on the backside cannot be completely avoided.

This is because the transfer rollers, etc. become obstacles in the backside shower, and the etchant cannot be uniformly attached.

In addition, at the beginning of the spray process, the portion where the fine droplets of the etchant hit becomes uneven, which cannot be eliminated even by the subsequent spray process, and fine stains remain after etching.

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