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Small-sized on-line radical shear interferometer and its aspheric surface measuring method

A shearing interferometer and aspherical lens technology, applied in optical precision measuring instruments and their measurement fields, can solve problems such as lack of versatility, and achieve the effects of good graphical interface, high precision, and rich man-machine dialogue operations

Inactive Publication Date: 2006-10-18
NANJING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These technologies need to design and manufacture different holographic templates or optical components for different test objects, and have high requirements for the test environment, so they are not universal

Method used

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  • Small-sized on-line radical shear interferometer and its aspheric surface measuring method
  • Small-sized on-line radical shear interferometer and its aspheric surface measuring method
  • Small-sized on-line radical shear interferometer and its aspheric surface measuring method

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Embodiment Construction

[0027] A small online radial shearing interferometer, including a laser, a lens, and a displacement adjustment mechanism, is characterized in that a He-Ne laser 1, a spatial filter 2, a collimating lens 3, a plane mirror 4, a beam splitting prism 5, The measured aspheric lens 6 and the convex mirror 7 are arranged sequentially in an optical path; The image lens 12 and the CCD camera 13 are arranged sequentially in another optical path separated by the dichroic prism 5; among them, the spatial filter 2, the convex mirror 7, the zone plate 8, and the iris 11 are all equipped with a displacement adjustment mechanism , the above parts are all set on the same bottom plate. Each part in the optical system light path of the present invention is as follows:

[0028] He-Ne laser 1 (length 280mm, power 1.5mw, wavelength 632.8nm);

[0029] Spatial filter 2 (40X objective lens and 25μ pinhole, including three-dimensional adjustment mechanism);

[0030] Double cemented achromatic collim...

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Abstract

The invention is a kind of small online radial cutting interferometer and the method for measuring a non-sphere, which refers to a kind of optical precise measuring device and the measuring method, the meter includes: He-Ne laser protective housing, spatial filter, collimate lens, flat reflecting mirror, light splitting prism, the measured non-sphere mirror, the convex lens, are arranged in one light channel; the light splitting prism, measured non-sphere mirror, the convex mirror, the waveband board, the filter piece, the variable conjunction, imaging lens, CCD camera are all in the other channel; the spatial filter, the convex mirror the waveband board, the variable light conjunction are set with a shift adjusting mechanism, the above all are set in the same board. The method is: (1) adjusting the radial cutting interferometer; (2) processes the image and reconstructs the three-dimension wave phase difference.

Description

technical field [0001] The invention relates to an optical precision measuring instrument and a measuring method thereof, in particular to a radial shear interferometer and a method for measuring an aspheric surface. Background technique [0002] Aspheric surfaces play an important role in space optics, military optics, astronomical research and high-tech civilian products. Due to the ever-changing surface shapes of aspheric surfaces, various existing detection methods have their limited measurement objects. The common interferometry with compensator makes optical design and system structure more complicated. For example, the interferometers of Wyko and Zygo have a measuring aperture of Φ500mm and an accuracy of λ / 50. But the structure is complicated, the price is expensive, and it is difficult to use online. Known from existing patents, the researched technologies all employ additional holograms and other optical elements. For example, "Holog...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/023G01B11/24G06F17/14G06T15/00
Inventor 王鸣张斌聂守平谈苏庆
Owner NANJING NORMAL UNIVERSITY