Small-sized on-line radical shear interferometer and its aspheric surface measuring method
A shearing interferometer and aspherical lens technology, applied in optical precision measuring instruments and their measurement fields, can solve problems such as lack of versatility, and achieve the effects of good graphical interface, high precision, and rich man-machine dialogue operations
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0027] A small online radial shearing interferometer, including a laser, a lens, and a displacement adjustment mechanism, is characterized in that a He-Ne laser 1, a spatial filter 2, a collimating lens 3, a plane mirror 4, a beam splitting prism 5, The measured aspheric lens 6 and the convex mirror 7 are arranged sequentially in an optical path; The image lens 12 and the CCD camera 13 are arranged sequentially in another optical path separated by the dichroic prism 5; among them, the spatial filter 2, the convex mirror 7, the zone plate 8, and the iris 11 are all equipped with a displacement adjustment mechanism , the above parts are all set on the same bottom plate. Each part in the optical system light path of the present invention is as follows:
[0028] He-Ne laser 1 (length 280mm, power 1.5mw, wavelength 632.8nm);
[0029] Spatial filter 2 (40X objective lens and 25μ pinhole, including three-dimensional adjustment mechanism);
[0030] Double cemented achromatic collim...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 