Process for preparing nano-carbon tubes
A technology of carbon nanotubes and carbon nanotube arrays, applied in the direction of carbon nanotubes, oriented carbon nanotubes, nanocarbons, etc., can solve problems such as difficult dispersion, entanglement of carbon nanotubes, and inability to control the length of carbon nanotubes. To achieve the effect of controllable length and consistent length
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Embodiment 1
[0033] Growth of carbon nanotube arrays with a length of 10 μm: a 5 nm thick iron catalyst film was deposited on a porous silicon substrate, then the iron-deposited substrate was annealed at 400 °C for 10 hours in air, and then the substrate was placed in a quartz reaction boat It was sent to the central reaction chamber of the quartz tube reaction furnace. Under the protection of argon, the reaction furnace was heated to 690 ° C, and ethylene gas was introduced to react for 15 seconds. Then the reaction furnace was cooled to room temperature to obtain a length of 10 μm. of carbon nanotube arrays.
Embodiment 2
[0035] Growth of carbon nanotube arrays with a length of 100 μm: a 5 nm-thick iron catalyst film was deposited on a porous silicon substrate, then the iron-deposited substrate was annealed at 400 °C for 10 hours in air, and then the substrate was placed in a quartz reaction boat It was sent to the central reaction chamber of the quartz tube reaction furnace. Under the protection of argon, the reaction furnace was heated to 690 ° C, ethylene gas was introduced, and the reaction was carried out for 5 minutes. Then the reaction furnace was cooled to room temperature to obtain a length of 100 μm. of carbon nanotube arrays.
Embodiment 3
[0037] Growth of carbon nanotube arrays with a length of 500 μm: a 5 nm-thick iron catalyst film was deposited on a porous silicon substrate, then the iron-deposited substrate was annealed at 400 °C for 10 hours in air, and then the substrate was placed in a quartz reaction boat It was sent to the central reaction chamber of the quartz tube reaction furnace. Under the protection of argon, the reaction furnace was heated to 710 ° C, and ethylene gas was introduced to react for 10 minutes, and then the reaction furnace was cooled to room temperature to obtain a length of 500 μm. of carbon nanotube arrays.
[0038] Experiments have confirmed that the density of carbon nanotube arrays can reach 0.1g / cm 3 . Based on the calculation of growing an array with a height of 100 μm, a reactor capable of placing 30 4-inch (25.4 mm) silicon wafer substrates (single-side catalyst) can produce about 2.4 grams of 100 μm long carbon nanotubes at one time, and the growth process takes time. Ab...
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