Semiconductor device
A semiconductor and device technology, applied in the field of semiconductor devices, which can solve problems such as difficulty in meeting customer requirements
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[0027] Hereinafter, the semiconductor device of the present invention will be described in detail with reference to FIGS. 1 to 5 .
[0028] 1(A) is a perspective view showing the structure of the semiconductor element of the present invention, and FIG. 1(B) is a plan view showing the structure of the semiconductor element of the present invention. As shown in FIG. 1(A), an N-type epitaxial layer 2 is deposited on an N+ type semiconductor substrate 1 . On this epitaxial layer 2, a plurality of grooves 7 are formed parallel to each other at equal intervals from the surface. Also, the substrate 1 is used as a drain extraction region, and the epitaxial layer 2 is mainly used as a drain region 3 . In addition, the side walls of the groove 7 are excavated almost vertically from the surface of the epitaxial layer 2, and the insulating film 6 is formed on the inner wall thereof. Further, in the groove 7, for example, polysilicon implanted with P-type impurities is deposited. The de...
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