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Double frequency laser interferometer

A dual-frequency laser interference and dual-frequency laser technology, which is applied to instruments, optical devices, and measuring devices, can solve the problems of measurement accuracy on the order of microns

Inactive Publication Date: 2005-03-02
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] At present, although an ordinary dual-frequency laser interferometer itself has a relatively high resolution, for example, up to nanometers, in many cases, the measurement given by a dual-frequency laser interferometer with a resolution of nanometers Accuracy is often on the order of microns or worse

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Embodiment Construction

[0014] see first figure 2 , figure 2 It is a schematic diagram of the structure of the dual-frequency laser interferometer of the present invention. As can be seen from the figure, the dual-frequency laser interferometer of the present invention comprises a dual-frequency laser 4, and a polarizing beam splitter 2 is arranged on the output optical path of the laser 4, and the beam-splitting surface of the polarizing beam splitter 2 is 45° to the output optical path of the laser 4 Place a fixed corner cube 5 in the reflected light direction of the polarizing beam splitter 2, a moving corner cube 1 in the transmission direction, and a detector on the same side of the output light direction of the polarizing beam splitter 2 and the dual-frequency laser 4 3, it is characterized in that a reflector 6 is arranged between the polarizing beam splitter 2 and the detector 3, and a beam converter 8 and a beam converter 8 are placed at 45° on the optical path between the dual-frequency ...

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Abstract

A subdivision dual-frequency laser interferometer includes a dual-frequency laser maser whose output optical path set a polarization spectroscope, spectrum plate of which has 45 to output optical path of the dual-frequency laser maser, in direction of reflected light optical path the polarization spectroscope there is a fixed pyramid prism and in transmission direction is a moving pyramid prism, a detector set in the direction of reflected light optical path the polarization spectroscope and at the same side of the dual-frequency laser maser, which has the characters that fixed a reflecting mirror are set between the dual-frequency laser maser and polarization spectroscope and a luminous flux convertor and reflecting mirror are set with an angle of 45deg.c to the between the dual-frequency laser maser and polarization spectroscope. The invention has increased testing accuracy eight times compared with other present dual-frequency laser interferometer under the same testing circumstance, its high accuracy method is convenient economical.

Description

technical field [0001] The invention relates to length measurement and is an improvement to a dual-frequency laser interferometer to improve the resolution of the dual-frequency laser interferometer. Background technique [0002] Due to the comprehensive advantages of large measurement range, high resolution, high precision, and high speed, the dual-frequency laser interferometer can be combined with different accessories to measure length, speed, angle, flatness, straightness, and verticality. Such measurement has been widely used in precision and ultra-precision manufacturing fields, such as the calibration of precision coordinate machine tools, the calibration of high-precision sensors, the precise positioning of workpiece tables and mask tables of lithography machines, etc. [0003] The structure of the current commercial dual-frequency laser interferometer is as follows: figure 1 As shown, the dual-frequency laser interferometer includes a dual-frequency laser 4, and a...

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Application Information

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IPC IPC(8): G01B9/02G01B11/02
Inventor 程兆谷高海军
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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