Device for and method of creating a model for determining relationship between process and quality

A technology for model generation and quality models, used in secure communication devices, application-specific simulation processes, transmission systems, etc.

Inactive Publication Date: 2005-08-17
CANON SYST SOLUTIONS +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

None of the techniques disclosed in any of the above-mentioned documents satisfies such a requirement

Method used

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  • Device for and method of creating a model for determining relationship between process and quality
  • Device for and method of creating a model for determining relationship between process and quality
  • Device for and method of creating a model for determining relationship between process and quality

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Embodiment Construction

[0111] FIG. 1 shows a semiconductor manufacturing system including a model generation device according to a first embodiment of the present invention. This system includes a process device 2 , an inspection device 3 and a model generation device 10 . These devices are connected to each other through an EES (Equipment Engineering System) network 7 , a device network for exchanging more detailed process-related information than production management information at high speed. Although illustration is omitted, other process devices and inspection devices used in the preceding and subsequent stages of the manufacturing process are also connected to the EES network 7 . Moreover, the system includes an MES (Manufacturing Execution System) production management system 9 and an MES system network 8 connected to it for transmitting production management information. The EES network 7 and the MES network 8 are connected via a router 12 . Each device on the EES network 7 can also be ac...

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Abstract

A model creating device inputs process status data that are obtained in time series during a period during which each of process steps of a process is carried out and are related to status of this process, as well as inspection result data related to object articles that were processed by said process. An extracting part extracts a characteristic quantity from the process status data for every unit object article and for every process step. An analyzing part carries out an analysis by data mining by using the characteristic quantities and inspection result data in correlation with the unit object articles and creates a process-quality model that shows a relationship between the correlated characteristic quantities and inspection result data.

Description

technical field [0001] The present invention relates to a model generation device and a model generation method that acquires process state information that can affect the quality of an object product that can be processed in association with the state of a process composed of a plurality of process steps and inspection results related to the object product Information, and generate a process-quality model for expressing the relationship between the process feature quantity extracted from the process state information and the inspection result information. Background technique [0002] The manufacturing process of various products including semiconductors must be properly managed in order to increase or maintain a high yield of products. [0003] In Patent Document 1, it is disclosed that, based on the data acquisition time, device state data corresponding to the degree of vacuum or heater power of the CVD device and product data such as the yield rate or electrical characte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418C23C14/34G05B23/02G06F17/30G06F19/00G06G7/48G06Q50/00G06Q50/04H01L21/00H01L21/02H01L21/66H04L9/00
CPCG06Q10/06
Inventor 山田贤太郎青山行宏小川实中村寿一合川祯一
Owner CANON SYST SOLUTIONS
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