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Micromechanical angle acceleration sensor

An angular acceleration and sensor technology, applied in the field of microelectronics, can solve the problems of complex comb structure, poor anti-overload capability, affecting service life, etc., and achieve the effects of large dynamic range, strong anti-overload capability, and high measurement accuracy.

Inactive Publication Date: 2006-03-15
ZHONGBEI UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0005] MEMS gyroscopes also bring corresponding deficiencies and shortcomings in order to expand the dynamic range and improve detection sensitivity and measurement accuracy. Measurements in very large and harsh environments

Method used

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  • Micromechanical angle acceleration sensor
  • Micromechanical angle acceleration sensor
  • Micromechanical angle acceleration sensor

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Embodiment Construction

[0021] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0022] figure 1 , figure 2 , image 3 and Figure 4 As shown, the basic structure of the micromechanical angular acceleration sensor includes a suspended mass 1, two beams 2 connecting the suspended mass and the fixed end, and two detection plates 3 related to the detection of angular acceleration, the detection plate and the fixed end Terminal 4 is fixed, and the mass block and the detection plate are two electrodes of capacitance; when a rotating angular acceleration is applied to the beam connecting the mass block, the mass block will deflect, causing the distance between the mass block and the detection plate to change The change will eventually lead to a change in the capacitance value of the detection plate, and the magnitude of the measured angular acceleration can be determined by testing the capacitance change of the detection pla...

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Abstract

A micro mechanical transducer of angular acceleration is featured as fixing detection polar plate on fixing end, using mass block and detection polar plate as two electrodes of capacity, generating deflection of mass block to lead distance variation between mass block and detection polar plate for finally causing capacity value variation between mass block and detection polar plate when rotating angular acceleration is exerted on beam connected with mass block, judging size of angular acceleration to be measured by testing out capacity variation amount of detection polar plate.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, in particular to an angular acceleration sensor used for measuring the attitude of a moving body. Background technique [0002] At present, traditional rate gyroscopes are used to measure the attitude of moving bodies. The working principle of rate gyroscopes is to sense angular rate signals through Coriolis force. The most widespread application of MEMS is the design and manufacture of miniature sensors. The electromechanical part using the sensor generates sensitive information, and the electronic part processes the information generated by the electromechanical part. A MEMS gyroscope is a MEMS sensor used to measure angular velocity. [0003] At present, the latest technology of MEMS gyroscopes, such as "Sensing Technology (Journal of Transducer Technology) 1998, Volume 17, No. 1", "The relationship between the detection sensitivity of silicon micromachined tuning fork gyro and the ...

Claims

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Application Information

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IPC IPC(8): G01P15/125
Inventor 李锦明张文栋刘俊熊继军秦丽马游春罗源源
Owner ZHONGBEI UNIV